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Fabrication of glass microprism via interfacial erosion induced quasi-anisotropic wet etching
Micro/Nano Technology and Fine Mechanics | 更新时间：2024-05-18
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    • Fabrication of glass microprism via interfacial erosion induced quasi-anisotropic wet etching

    • “科技媒体最新报道，玻璃微棱镜因其优异性能备受关注，但加工微棱镜阵列一直是挑战。科研团队提出了界面钻蚀主导的玻璃准各向异性湿法刻蚀新方法，成功制备了高质量的微棱镜阵列器件。该方法打破了传统湿法刻蚀各向同性的认知，为玻璃微棱镜阵列等器件提供了高效低成本的制备新途径，光亮度提升显著，有望引领微棱镜应用领域的新发展。”
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    • Optics and Precision Engineering   Vol. 32, Issue 9, Pages: 1384-1394(2024)

    • DOI：10.37188/OPE.20243209.1384    

      CLC： TN215;TN03

    • Published：10 May 2024，

      Received：11 January 2024，

      Revised：20 February 2024，

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  • LI Feier,YU Jiajia,DU Liqun,et al.Fabrication of glass microprism via interfacial erosion induced quasi-anisotropic wet etching[J].Optics and Precision Engineering,2024,32(09):1384-1394. DOI： 10.37188/OPE.20243209.1384.

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WU Mengxi
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Ke-qiang QIU

Related Institution

National Synchrotron Radiation Laboratory, University of Science and Technology of China
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