Fabrication of glass microprism via interfacial erosion induced quasi-anisotropic wet etching
Micro/Nano Technology and Fine Mechanics|更新时间:2024-05-18
|
Fabrication of glass microprism via interfacial erosion induced quasi-anisotropic wet etching
“According to the latest reports from technology media, glass microprism has attracted much attention due to its excellent performance, but processing microprism arrays has always been a challenge. The research team proposed a new method of glass quasi anisotropic wet etching dominated by interface drilling and successfully prepared high-quality microprism array devices. This method breaks the traditional understanding of isotropic wet etching and provides an efficient and low-cost new approach for the preparation of glass microprism arrays and other devices. The brightness is significantly improved, which is expected to lead the new development of microprism applications.”
Optics and Precision EngineeringVol. 32, Issue 9, Pages: 1384-1394(2024)
LI Feier,YU Jiajia,DU Liqun,et al.Fabrication of glass microprism via interfacial erosion induced quasi-anisotropic wet etching[J].Optics and Precision Engineering,2024,32(09):1384-1394.
LI Feier,YU Jiajia,DU Liqun,et al.Fabrication of glass microprism via interfacial erosion induced quasi-anisotropic wet etching[J].Optics and Precision Engineering,2024,32(09):1384-1394. DOI: 10.37188/OPE.20243209.1384.
Fabrication of glass microprism via interfacial erosion induced quasi-anisotropic wet etching