您当前的位置:
首页 >
文章列表页 >
Fabrication of glass microprism via interfacial erosion induced quasi-anisotropic wet etching
Micro/Nano Technology and Fine Mechanics | 更新时间:2024-05-18
    • Fabrication of glass microprism via interfacial erosion induced quasi-anisotropic wet etching

    • According to the latest reports from technology media, glass microprism has attracted much attention due to its excellent performance, but processing microprism arrays has always been a challenge. The research team proposed a new method of glass quasi anisotropic wet etching dominated by interface drilling and successfully prepared high-quality microprism array devices. This method breaks the traditional understanding of isotropic wet etching and provides an efficient and low-cost new approach for the preparation of glass microprism arrays and other devices. The brightness is significantly improved, which is expected to lead the new development of microprism applications.
    • Optics and Precision Engineering   Vol. 32, Issue 9, Pages: 1384-1394(2024)
    • DOI:10.37188/OPE.20243209.1384    

      CLC: TN215;TN03
    • Received:11 January 2024

      Revised:20 February 2024

      Published:10 May 2024

    移动端阅览

  • LI Feier,YU Jiajia,DU Liqun,et al.Fabrication of glass microprism via interfacial erosion induced quasi-anisotropic wet etching[J].Optics and Precision Engineering,2024,32(09):1384-1394. DOI: 10.37188/OPE.20243209.1384.

  •  
  •  

0

Views

453

下载量

0

CSCD

Alert me when the article has been cited
提交
Tools
Download
Export Citation
Share
Add to favorites
Add to my album

Related Articles

Calibration method of silicon 〈111〉 orientation and its application in fabrication of silicon grating by anisotropic wet etching
Morphologic control of wet anisotropic silicon etching

Related Author

WU Mengxi
DU Liqun
YU Jiajia
Yan-chang ZHENG
Yi-lin HONG
Xiang-dong XU
Zheng-kun LIU
Ke-qiang QIU

Related Institution

National Synchrotron Radiation Laboratory, University of Science and Technology of China
School of Mechanical and Automotive Engineering, Anhui Polytechnic University
School of Electronic Engineering and Optoelectronic Technology, Nanjing University of Science and Technology
Institute of Electronic Engineering, China Academy of Engineering Physics
0