Optimal design and experimentation of a low-parasitic performance-balanced compliant guide platform

ZHENG Chengxin; SUN Xiaoqing; SUN Zhihong; MIAO Yijie; HOU Xiusong

doi:10.37188/OPE.20243212.1891

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Optimal design and experimentation of a low-parasitic performance-balanced compliant guide platform

Micro/Nano Technology and Fine Mechanics | 更新时间：2024-07-26

- Optimal design and experimentation of a low-parasitic performance-balanced compliant guide platform
- Optics and Precision Engineering Vol. 32, Issue 12, Pages: 1891-1901(2024)
- 作者机构：
  
  1.东华大学机械工程学院，上海 201620
  2.东华大学产业用纺织品教育部工程研究中心，上海 201620
  3.国家先进印染技术创新中心，山东泰安 271000
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20243212.1891
  CLC： TH703;TP27
- Published：25 June 2024，
  
  Received：07 March 2024，
  
  Revised：12 April 2024，
- 稿件说明：
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郑诚心,孙小庆,孙志宏等.低寄生性能均衡的柔顺导向平台优化设计与实验[J].光学精密工程,2024,32(12):1891-1901.

ZHENG Chengxin,SUN Xiaoqing,SUN Zhihong,et al.Optimal design and experimentation of a low-parasitic performance-balanced compliant guide platform[J].Optics and Precision Engineering,2024,32(12):1891-1901.
郑诚心,孙小庆,孙志宏等.低寄生性能均衡的柔顺导向平台优化设计与实验[J].光学精密工程,2024,32(12):1891-1901. DOI： 10.37188/OPE.20243212.1891.

ZHENG Chengxin,SUN Xiaoqing,SUN Zhihong,et al.Optimal design and experimentation of a low-parasitic performance-balanced compliant guide platform[J].Optics and Precision Engineering,2024,32(12):1891-1901. DOI： 10.37188/OPE.20243212.1891.

摘要

受青蛙后肢的运动过程和对称式结构的启发，提出一种兼顾长行程和较高工作频率的柔顺刀具导向平台，解决了刀具导向平台中直驱式工作行程短和放大式工作频率低的问题。首先，提出柔顺导向平台初步模型，确定重要杆件长度。其次，利用有限元分析对初步模型进行多目标优化设计，并采用熵权法和优劣解距离法（TOPSIS）进行得分排序。在此基础上，进一步利用有限元分析进行结构的多工况拓扑优化。最后，加工试验样机进行实验测试。有限元分析和试验结果表明：该导向平台放大比为4.67，最大行程可达90 μm左右，一阶固有频率为1 765 Hz，实现了长行程和高频率的运动；同时，导向平台的分辨率可达亚微米级，轨迹跟踪误差约为2%。综合仿真结果和实验测试结果，所提出来的柔顺刀具导向平台可以实现精密导向运动。

Abstract

Inspired by the movement process and symmetrical structure of the hind limbs of frogs. A compliant tool guide platform that combines long stroke and high working frequency was proposed. The problems of short working stroke of the direct drive type and low working frequency of the amplified type in the tool guiding platform were solved. First of all， a preliminary model of the compliant guide platform was proposed. The lengths of important rods were determined. In the second place， multi-objective optimization design was carried out on the preliminary model using finite element analysis. And the entropy weight method and the distance between superior and inferior solutions （TOPSIS） were used to rank the scores. On this basis， the structure was further optimized for the multi-operational topology using finite element analysis. In the end， the test prototype was machined for experimental testing. The finite element analysis and experimental results show that the amplification ratio of the guide platform is 4.67. And the maximum stroke can reach about 90 μm. The first-order natural frequency is 1 765 Hz. The results of experimental tests on amplification ratio and natural frequency indicate that the proposed tool guide platform is capable of achieving long stroke and high frequency motion. And the X-axis parasitic error is 0.002 2%. This can be seen as the presence of low parasitic displacements in the guide platform. At the same time， the resolution of the guide platform can reach the sub-micron level. And the trajectory tracking error is about 2%. Combining the simulation and experimental test results， the proposed compliant tool guide platform can achieve precision guided motion.

关键词

柔顺机构压电驱动长行程高频寄生位移

Keywords

compliant mechanismpiezoelectric actuationlong strokefinite element designparasitic displacement

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