ZHENG Chengxin,SUN Xiaoqing,SUN Zhihong,et al.Optimal design and experimentation of a low-parasitic performance-balanced compliant guide platform[J].Optics and Precision Engineering,2024,32(12):1891-1901.
ZHENG Chengxin,SUN Xiaoqing,SUN Zhihong,et al.Optimal design and experimentation of a low-parasitic performance-balanced compliant guide platform[J].Optics and Precision Engineering,2024,32(12):1891-1901. DOI: 10.37188/OPE.20243212.1891.
Optimal design and experimentation of a low-parasitic performance-balanced compliant guide platform