您当前的位置：
首页 >
文章列表页 >
High-precision measurement of Wolter-I mandrel for X-ray microscopy by using double confocal probes
Modern Applied Optics | 更新时间：2024-08-19
|

    • High-precision measurement of Wolter-I mandrel for X-ray microscopy by using double confocal probes

    • “在X射线显微镜领域，研究人员成功搭建了基于光谱共焦探针的离线检测装置，实现了Wolter型芯轴表面中低频轮廓的高精度测量，并通过校准测试过程，将误差降至23纳米，验证了检测方法的准确性。”
    • Optics and Precision Engineering   Vol. 32, Issue 13, Pages: 2004-2016(2024)

    • DOI：10.37188/OPE.20243213.2004    

      CLC： TH74

    • Published：10 July 2024，

      Received：22 January 2024，

      Revised：15 March 2024，

    扫 描 看 全 文

  • XUE Chunan,YU Jun,SHENG Pengfeng,et al.High-precision measurement of Wolter-I mandrel for X-ray microscopy by using double confocal probes[J].Optics and Precision Engineering,2024,32(13):2004-2016. DOI： 10.37188/OPE.20243213.2004.

  •  
  •  

0

Views

22

下载量

0

CSCD

Alert me when the article has been cited
提交
Tools
Download
Export Citation
Share
Add to favorites
Add to my album

Related Articles

Influences analysis of the pentaprism scannig system due to alignment error and fabrication angles error
Error analysis and correction of surface inclination angle of non-coaxial parallel chromatic confocal measurement system
Axis alignment and error analysis of a novel rotating laser-scanning system
Magnetic field time-gate displacement sensor based on discrete winding and its error characteristics
Schlieren diagnosis and characteristic analysis of outlet flow field for blasting shock tube

Related Author

刘志祥
马冬梅
卞江
马磊
LI Shushu
YU Qing
ZHANG Yaozu
ZHANG Wei

Related Institution

长春光学精密机械与物理研究所
College of Mechanical Engineering and Automation， Huaqiao University
Fujian Key Laboratory of Green Intelligent Drive and Transmission for Mobile Machinery
Xiamen Institute of Measurement and Testing
State Key Laboratory of Precision Measurement Technology and Instruments， Tianjin University， Tianjin 3000072
0