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High-precision measurement of Wolter-I mandrel for X-ray microscopy by using double confocal probes
Modern Applied Optics | 更新时间：2024-08-19
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    • High-precision measurement of Wolter-I mandrel for X-ray microscopy by using double confocal probes

    • “In the field of X-ray microscopy, researchers have successfully built an offline detection device based on spectral confocal probes, achieving high-precision measurement of low-frequency profiles on Wolter type core shaft surfaces. Through calibration testing, the error has been reduced to 23 nanometers, verifying the accuracy of the detection method.”
    • Optics and Precision Engineering   Vol. 32, Issue 13, Pages: 2004-2016(2024)

    • DOI：10.37188/OPE.20243213.2004    

      CLC： TH74

    • Received：22 January 2024，

      Revised：15 March 2024，

      Published：10 July 2024

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  • XUE Chunan,YU Jun,SHENG Pengfeng,et al.High-precision measurement of Wolter-I mandrel for X-ray microscopy by using double confocal probes[J].Optics and Precision Engineering,2024,32(13):2004-2016. DOI： 10.37188/OPE.20243213.2004.

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