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Error analysis and correction of surface inclination angle of non-coaxial parallel chromatic confocal measurement system
Modern Applied Optics | 更新时间：2024-08-19
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    • Error analysis and correction of surface inclination angle of non-coaxial parallel chromatic confocal measurement system

    • “在精密测量领域，研究人员提出了一种针对非同轴式并行彩色共聚焦测量系统的误差补偿方法。通过实验验证，该方法能有效消除因被测物表面倾斜产生的数据误差，提高测量精度至微米级。”
    • Optics and Precision Engineering   Vol. 32, Issue 13, Pages: 2040-2051(2024)

    • DOI：10.37188/OPE.20243213.2040    

      CLC： TH703

    • Published：10 July 2024，

      Received：09 January 2024，

      Revised：09 March 2024，

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  • LI Shushu,YU Qing,ZHANG Yaozu,et al.Error analysis and correction of surface inclination angle of non-coaxial parallel chromatic confocal measurement system[J].Optics and Precision Engineering,2024,32(13):2040-2051. DOI： 10.37188/OPE.20243213.2040.

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