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Error analysis and correction of surface inclination angle of non-coaxial parallel chromatic confocal measurement system
Modern Applied Optics | 更新时间：2024-08-19
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    • Error analysis and correction of surface inclination angle of non-coaxial parallel chromatic confocal measurement system

    • “In the field of precision measurement, researchers have proposed an error compensation method for non coaxial parallel color confocal measurement systems. Through experimental verification, this method can effectively eliminate data errors caused by surface tilt of the measured object and improve measurement accuracy to the micrometer level.”
    • Optics and Precision Engineering   Vol. 32, Issue 13, Pages: 2040-2051(2024)

    • DOI：10.37188/OPE.20243213.2040    

      CLC： TH703

    • Received：09 January 2024，

      Revised：09 March 2024，

      Published：10 July 2024

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  • LI Shushu,YU Qing,ZHANG Yaozu,et al.Error analysis and correction of surface inclination angle of non-coaxial parallel chromatic confocal measurement system[J].Optics and Precision Engineering,2024,32(13):2040-2051. DOI： 10.37188/OPE.20243213.2040.

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