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Error analysis and correction of surface inclination angle of non-coaxial parallel chromatic confocal measurement system
Error analysis and correction of surface inclination angle of non-coaxial parallel chromatic confocal measurement system
- “A method for compensating measurement errors in non coaxial parallel color confocal measurement systems when the surface of the measured object is tilted is proposed. Researchers have established a tilted surface error compensation system to provide a solution to the problem of tilt errors in precision measurements.”
- Optics and Precision Engineering Vol. 32, Issue 13, Pages: 2040-2051(2024)
DOI： 10.37188/OPE.20243213.2040
Revised：2024-03-09
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Related Author
JI Tao
JIA Xue
YANG Yuxiang
ZHANG Jiyun
JIAO Shaowei
PEI Yuhang
LOU Zhifeng
JIAO Shaowei
Related Institution
College of Mechanical Engineering， Dalian University of Technology
Beijing Research Institute of Automation for Machinery Industry Co.， Ltd.
School of Electromechanical Engineering， Beijing Information Science and Technology University
Institute of High Energy Physics， Chinese Academy of Sciences
School of Mathematics and Computer Science， Guangdong Ocean University
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