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Design and experiment of micro-arrayed beam blanker
Micro\/Nano Technology and Fine Mechanics | 更新时间：2026-09-11

    • Design and experiment of micro-arrayed beam blanker

    • Optics and Precision Engineering   Vol. 32, Issue 13, Pages: 2061-2069(2024)

    • DOI：10.37188/OPE.20243213.2061    

      CLC： TN16

    • Received：09 April 2024，

      Revised：2024-06-19，

      Published：10 July 2024

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  • ZHANG Lixin,SUN Botong,LIU Xingyun,et al.Design and experiment of micro-arrayed beam blanker[J].Optics and Precision Engineering,2024,32(13):2061-2069.

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Related Author

HAN Li
LIU Junbiao
YIN Bohua
LIU Xingyun
SUN Botong
ZHANG Lixin
SHU Zhiwen
ZENG Pei

Related Institution

Research Department of Micro-nano Fabrication Technology and Intelligent Electronic Devices， Institute of Electrical Engineering Chinese Academy of Sciences
Ji Hua Laboratory
National Engineering Research Centre for High Efficiency Grinding， College of Mechanical and Vehicle Engineering， Hunan University
Changchun Institute of Optics， Fine Mechanics and Physics， Chinese Academy of Sciences
University of Chinese Academy of Sciences
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