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Design and experiment of micro-arrayed beam blanker
Micro/Nano Technology and Fine Mechanics | 更新时间：2024-08-19
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    • Design and experiment of micro-arrayed beam blanker

    • “在多束电子束曝光系统领域，研究人员设计并制作了3×3微型阵列束闸，成功实现了电子束的快速开/关控制。通过优化设计和MEMS工艺制备，验证了控制器的偏转速度和功能完整性。实验结果表明，阵列束闸控制器偏转速度达到43.5 MHz，电子束偏转距离在25~30 μm，串扰小于3%。该研究为提高多束电子束曝光精度和效率提供了重要基础。”
    • Optics and Precision Engineering   Vol. 32, Issue 13, Pages: 2061-2069(2024)

    • DOI：10.37188/OPE.20243213.2061    

      CLC： TN16

    • Published：10 July 2024，

      Received：09 April 2024，

      Revised：19 June 2024，

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  • ZHANG Lixin,SUN Botong,LIU Xingyun,et al.Design and experiment of micro-arrayed beam blanker[J].Optics and Precision Engineering,2024,32(13):2061-2069. DOI： 10.37188/OPE.20243213.2061.

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Related Author

HAN Li
LIU Junbiao
YIN Bohua
LIU Xingyun
SUN Botong
ZHANG Lixin
SHU Zhiwen
ZENG Pei

Related Institution

Research Department of Micro-nano Fabrication Technology and Intelligent Electronic Devices， Institute of Electrical Engineering Chinese Academy of Sciences
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University of Chinese Academy of Sciences
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