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High-stroke XY precision positioning stage based on Zigzag flexure hinge
Micro\/Nano Technology and Fine Mechanics | 更新时间:2026-09-11
    • High-stroke XY precision positioning stage based on Zigzag flexure hinge

    • Optics and Precision Engineering   Vol. 32, Issue 13, Pages: 2070-2080(2024)
    • DOI:10.37188/OPE.20243213.2070    

      CLC: TH132;TH122
    • Received:30 December 2023

      Revised:2024-03-01

      Published:10 July 2024

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  • ZHAO Linfeng,LING Mingxiang,XUE Liwei,et al.High-stroke XY precision positioning stage based on Zigzag flexure hinge[J].Optics and Precision Engineering,2024,32(13):2070-2080.

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