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High-stroke XY precision positioning stage based on Zigzag flexure hinge
Micro/Nano Technology and Fine Mechanics | 更新时间：2024-08-19
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    • High-stroke XY precision positioning stage based on Zigzag flexure hinge

    • “最新研究突破：采用Zigzag柔性簧片导向的并联式XY二自由度精密定位平台，实现3 mm×3 mm大行程、60 Hz高频响、1.3 μm高分辨率的精密运动控制，为精密制造领域提供创新解决方案。”
    • Optics and Precision Engineering   Vol. 32, Issue 13, Pages: 2070-2080(2024)

    • DOI：10.37188/OPE.20243213.2070    

      CLC： TH132;TH122

    • Published：10 July 2024，

      Received：30 December 2023，

      Revised：01 March 2024，

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  • ZHAO Linfeng,LING Mingxiang,XUE Liwei,et al.High-stroke XY precision positioning stage based on Zigzag flexure hinge[J].Optics and Precision Engineering,2024,32(13):2070-2080. DOI： 10.37188/OPE.20243213.2070.

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Related Institution

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Changchun Institute of Optic， Fine Mechanics and Physics， Chinese Academy of Sciences
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