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Double-sided lapping uniformity of LiTaO3 based on three-dimensional trajectory of particles
Micro\/Nano Technology and Fine Mechanics | 更新时间：2026-09-11

    • Double-sided lapping uniformity of LiTaO3 based on three-dimensional trajectory of particles

    • Optics and Precision Engineering   Vol. 32, Issue 13, Pages: 2081-2090(2024)

    • DOI：10.37188/OPE.20243213.2081    

      CLC： TH161.1;TG73

    • Received：30 January 2024，

      Revised：2024-03-13，

      Published：10 July 2024

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  • XUE Saisai,GUO Xiaoguang,JIA Yufan,et al.Double-sided lapping uniformity of LiTaO3 based on three-dimensional trajectory of particles[J].Optics and Precision Engineering,2024,32(13):2081-2090. DOI: 10.37188/OPE.20243213.2081.

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