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Double-sided lapping uniformity of LiTaO3 based on three-dimensional trajectory of particles
Micro/Nano Technology and Fine Mechanics | 更新时间:2024-08-19
    • Double-sided lapping uniformity of LiTaO3 based on three-dimensional trajectory of particles

    • In the field of precision machining, experts have established a material removal uniformity model considering three-dimensional micro cutting of abrasive particles, providing guidance for improving the removal uniformity of double-sided grinding materials for lithium tantalate chips.
    • Optics and Precision Engineering   Vol. 32, Issue 13, Pages: 2081-2090(2024)
    • DOI:10.37188/OPE.20243213.2081    

      CLC: TH161.1;TG73
    • Received:30 January 2024

      Revised:13 March 2024

      Published:10 July 2024

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  • XUE Saisai,GUO Xiaoguang,JIA Yufan,et al.Double-sided lapping uniformity of LiTaO3 based on three-dimensional trajectory of particles[J].Optics and Precision Engineering,2024,32(13):2081-2090. DOI: 10.37188/OPE.20243213.2081.

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