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Double-sided lapping uniformity of LiTaO3 based on three-dimensional trajectory of particles
Micro/Nano Technology and Fine Mechanics | 更新时间：2024-08-19
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    • Double-sided lapping uniformity of LiTaO3 based on three-dimensional trajectory of particles

    • “在精密加工领域，专家建立了考虑磨粒三维微切削的材料去除均匀性模型，为改善钽酸锂晶片双面研磨材料的去除均匀性提供了指导。”
    • Optics and Precision Engineering   Vol. 32, Issue 13, Pages: 2081-2090(2024)

    • DOI：10.37188/OPE.20243213.2081    

      CLC： TH161.1;TG73

    • Published：10 July 2024，

      Received：30 January 2024，

      Revised：13 March 2024，

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  • XUE Saisai,GUO Xiaoguang,JIA Yufan,et al.Double-sided lapping uniformity of LiTaO3 based on three-dimensional trajectory of particles[J].Optics and Precision Engineering,2024,32(13):2081-2090. DOI： 10.37188/OPE.20243213.2081.

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