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1.长春理工大学 光电工程学院,吉林 长春 130022
2.中国科学院 微电子研究所,北京 100094
3.中国科学院大学,北京 100049
4.雁栖湖基础制造技术研究院(北京)有限公司,北京 101407
E-mail: Soldier_1973@163.com & wangguoming1@ime.ac.cn
Published:25 July 2024,
Received:08 February 2024,
Revised:15 March 2024,
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霍汉林,王劲松,王国名等.二维激光跟踪转台轴系设计及动态形变误差修正[J].光学精密工程,2024,32(14):2200-2210.
HUO Hanlin,WANG Jinsong,WANG Guoming,et al.Shafting design and dynamic deformation error correction of two-dimensional laser tracking turntable[J].Optics and Precision Engineering,2024,32(14):2200-2210.
霍汉林,王劲松,王国名等.二维激光跟踪转台轴系设计及动态形变误差修正[J].光学精密工程,2024,32(14):2200-2210. DOI: 10.37188/OPE.20243214.2200.
HUO Hanlin,WANG Jinsong,WANG Guoming,et al.Shafting design and dynamic deformation error correction of two-dimensional laser tracking turntable[J].Optics and Precision Engineering,2024,32(14):2200-2210. DOI: 10.37188/OPE.20243214.2200.
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