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Ion beam polishing process parameters optimization and polishing experiment of ZnS
Micro/Nano Technology and Fine Mechanics | 更新时间：2024-10-23

    • Ion beam polishing process parameters optimization and polishing experiment of ZnS

    • “In the field of infrared optical guidance, the processing efficiency and surface accuracy of multispectral zinc sulfide optical components have been significantly improved. By optimizing the ion beam polishing process, the surface shape accuracy PV value decreased from 467 nanometers to 71.506 nanometers.”
    • Optics and Precision Engineering   Vol. 32, Issue 14, Pages: 2247-2255(2024)

    • DOI：10.37188/OPE.20243214.2247    

      CLC： TQ163;TN249

    • Received：26 February 2024，

      Revised：29 May 2024，

      Published：25 July 2024

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  • CAI Gen,ZHU Beibei,QIN Lin,et al.Ion beam polishing process parameters optimization and polishing experiment of ZnS[J].Optics and Precision Engineering,2024,32(14):2247-2255. DOI： 10.37188/OPE.20243214.2247.

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Related Author

XU Jianfeng
XIAO Junfeng
CHEN Xiao
SHE Zhongdi
SHANG Junhao
SHANG Yao
QIN Lin
ZHU Beibei

Related Institution

School of Mechanical Engineering， Hubei University of Technology
Shanghai Aerospace Control Technology Research Institute
School of Mechanical Science and Engineering， Huazhong University of Science and Technology
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
University of Chinese Academy of Sciences
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