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Grating interferometric precision nanometric measurement technology
Precision Measurement and Sensing | 更新时间:2024-10-17
    • Grating interferometric precision nanometric measurement technology

    • Grating interferometry technology has made significant progress in the field of precision nano measurement. Experts have analyzed the accuracy and error, providing reference for system development.
    • Optics and Precision Engineering   Vol. 32, Issue 17, Pages: 2591-2611(2024)
    • DOI:10.37188/OPE.20243217.2591    

      CLC: TH744.3;TN247
    • Received:17 April 2024

      Revised:25 May 2024

      Published:10 September 2024

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  • LI Xinghui,CUI Can.Grating interferometric precision nanometric measurement technology[J].Optics and Precision Engineering,2024,32(17):2591-2611. DOI: 10.37188/OPE.20243217.2591.

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Related Author

LI Xinghui
CUI Can
Lian-dong YU
Jia-ming CAO
Hui-ning ZHAO
Hua-kun JIA
Song PU
ZHANG Xiangchao

Related Institution

Tsinghua-Berkeley Shenzhen Institute, Tsinghua University
School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology
Anhui Province Key Laboratory of Measuring Theory and Precision Instrument
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College of Mechanical Engineering, Hebei University of Technology
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