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Grating interferometric precision nanometric measurement technology
Precision Measurement and Sensing | 更新时间：2024-10-17

    • Grating interferometric precision nanometric measurement technology

    • “Grating interferometry technology has made significant progress in the field of precision nano measurement. Experts have analyzed the accuracy and error, providing reference for system development.”
    • Optics and Precision Engineering   Vol. 32, Issue 17, Pages: 2591-2611(2024)

    • DOI：10.37188/OPE.20243217.2591    

      CLC： TH744.3;TN247

    • Received：17 April 2024，

      Revised：25 May 2024，

      Published：10 September 2024

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  • LI Xinghui,CUI Can.Grating interferometric precision nanometric measurement technology[J].Optics and Precision Engineering,2024,32(17):2591-2611. DOI： 10.37188/OPE.20243217.2591.

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Related Author

LI Xinghui
CUI Can
Lian-dong YU
Jia-ming CAO
Hui-ning ZHAO
Hua-kun JIA
Song PU
ZHANG Xiangchao

Related Institution

Tsinghua-Berkeley Shenzhen Institute， Tsinghua University
School of Instrument Science and Opto-electronics Engineering， Hefei University of Technology
Anhui Province Key Laboratory of Measuring Theory and Precision Instrument
School of Information Science and Technology， Fudan University
College of Mechanical Engineering， Hebei University of Technology
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