您当前的位置：
首页 >
文章列表页 >
Displacement sensing mechanism and measurement model of planar two-dimensional time-grating based on alternating magnetic field
Precision Measurement and Sensing | 更新时间：2024-10-17

    • Displacement sensing mechanism and measurement model of planar two-dimensional time-grating based on alternating magnetic field

    • “In the field of ultra precision lithography, a two-dimensional displacement measurement method based on spatial alternating magnetic field has been proposed, and millimeter scale sensors have been developed to achieve micrometer level measurement accuracy, which has important theoretical research significance and engineering application value.”
    • Optics and Precision Engineering   Vol. 32, Issue 17, Pages: 2612-2624(2024)

    • DOI：10.37188/OPE.20243217.2612    

      CLC： TH711

    • Received：27 February 2024，

      Revised：09 April 2024，

      Published：10 September 2024

    移动端阅览

  • CHEN Ziran,OUYang hui,ZHANG Hengxiao,et al.Displacement sensing mechanism and measurement model of planar two-dimensional time-grating based on alternating magnetic field[J].Optics and Precision Engineering,2024,32(17):2612-2624. DOI： 10.37188/OPE.20243217.2612.

  •  
  •  

0

Views

336

下载量

0

CSCD

Alert me when the article has been cited
提交
Tools
Download
Export Citation
Share
Add to favorites
Add to my album

Related Articles

Research on sensing mechanism and measurement model of magnetoresistive time-grating displacement based on spherical array
Magnetic field time-gate displacement sensor based on discrete winding and its error characteristics
Dynamic detection and recognition of welded defects based on magneto-optical imaging

Related Author

CHEN Ziran
QIN Lili
WANG Wei
XIONG Xin
LIU Zhenyue
ZHENG Yonghai
ZHANG Hengxiao
HE Zhiying

Related Institution

School of Electromechanical Engineering, Guangdong University of Technology
0