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White-light interferometry immune to vibration disturbance over wide frequency region
Precision Measurement and Sensing | 更新时间：2024-10-17
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    • White-light interferometry immune to vibration disturbance over wide frequency region

    • “在白光干涉测量领域，三点反正弦算法有效抑制振动干扰，提高测量精度，为宽频段振动干扰下的测量提供解决方案。”
    • Optics and Precision Engineering   Vol. 32, Issue 17, Pages: 2625-2634(2024)

    • DOI：10.37188/OPE.20243217.2625    

      CLC： TH742

    • Published：10 September 2024，

      Received：19 May 2024，

      Revised：25 June 2024，

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  • LIU Qian,MI Le,HUANG Xiaojin.White-light interferometry immune to vibration disturbance over wide frequency region[J].Optics and Precision Engineering,2024,32(17):2625-2634. DOI： 10.37188/OPE.20243217.2625.

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