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White-light interferometry immune to vibration disturbance over wide frequency region
Precision Measurement and Sensing | 更新时间:2024-10-17
    • White-light interferometry immune to vibration disturbance over wide frequency region

    • In the field of white light interferometry, the three-point anti sine algorithm effectively suppresses vibration interference, improves measurement accuracy, and provides a solution for measurement under wideband vibration interference.
    • Optics and Precision Engineering   Vol. 32, Issue 17, Pages: 2625-2634(2024)
    • DOI:10.37188/OPE.20243217.2625    

      CLC: TH742
    • Received:19 May 2024

      Revised:25 June 2024

      Published:10 September 2024

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  • LIU Qian,MI Le,HUANG Xiaojin.White-light interferometry immune to vibration disturbance over wide frequency region[J].Optics and Precision Engineering,2024,32(17):2625-2634. DOI: 10.37188/OPE.20243217.2625.

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