White-light interferometry immune to vibration disturbance over wide frequency region
Precision Measurement and Sensing|更新时间:2024-10-17
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White-light interferometry immune to vibration disturbance over wide frequency region
“In the field of white light interferometry, the three-point anti sine algorithm effectively suppresses vibration interference, improves measurement accuracy, and provides a solution for measurement under wideband vibration interference.”
Optics and Precision EngineeringVol. 32, Issue 17, Pages: 2625-2634(2024)
LIU Qian,MI Le,HUANG Xiaojin.White-light interferometry immune to vibration disturbance over wide frequency region[J].Optics and Precision Engineering,2024,32(17):2625-2634.
LIU Qian,MI Le,HUANG Xiaojin.White-light interferometry immune to vibration disturbance over wide frequency region[J].Optics and Precision Engineering,2024,32(17):2625-2634. DOI: 10.37188/OPE.20243217.2625.
White-light interferometry immune to vibration disturbance over wide frequency region