您当前的位置：
首页 >
文章列表页 >
Perpendicularity measurement of multi-axis motion platform based on laser interferometry
Precision Measurement and Sensing | 更新时间：2024-10-17
|

    • Perpendicularity measurement of multi-axis motion platform based on laser interferometry

    • “在精密测量领域，专家提出了基于激光干涉仪原理的多轴运动平台垂直度在线测量方法，构建了多轴激光干涉垂直度测量装置，实现了高效率、高精度的垂直度在线测量。”
    • Optics and Precision Engineering   Vol. 32, Issue 17, Pages: 2654-2662(2024)

    • DOI：10.37188/OPE.20243217.2654    

      CLC： TB921

    • Published：10 September 2024，

      Received：13 March 2024，

      Revised：18 March 2024，

    移动端阅览

  • LUO Kaiyuan,ZHENG Wenwei,YANG Lin.Perpendicularity measurement of multi-axis motion platform based on laser interferometry[J].Optics and Precision Engineering,2024,32(17):2654-2662. DOI： 10.37188/OPE.20243217.2654.

  •  
  •  

0

Views

82

下载量

0

CSCD

Alert me when the article has been cited
提交
Tools
Download
Export Citation
Share
Add to favorites
Add to my album

Related Articles

No data

Related Author

No data

Related Institution

No data
0