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Perpendicularity measurement of multi-axis motion platform based on laser interferometry
Precision Measurement and Sensing | 更新时间：2026-09-11

    • Perpendicularity measurement of multi-axis motion platform based on laser interferometry

    • Optics and Precision Engineering   Vol. 32, Issue 17, Pages: 2654-2662(2024)

    • DOI：10.37188/OPE.20243217.2654    

      CLC： TB921

    • Received：13 March 2024，

      Revised：2024-03-18，

      Published：10 September 2024

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  • LUO Kaiyuan,ZHENG Wenwei,YANG Lin.Perpendicularity measurement of multi-axis motion platform based on laser interferometry[J].Optics and Precision Engineering,2024,32(17):2654-2662.

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