Coordinate unification and data fusion for composite measurement with contact and white light interferometric probes
Precision Measurement and Sensing|更新时间:2024-10-17
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Coordinate unification and data fusion for composite measurement with contact and white light interferometric probes
“In the field of composite measurement, experts have proposed coordinate unification methods, designed new calibrators, achieved high-precision coordinate unification and data fusion, and improved device measurement capabilities.”
Optics and Precision EngineeringVol. 32, Issue 17, Pages: 2698-2707(2024)
CHENG Zhenying,XU Dongjian,ZHANG Chengyao,et al.Coordinate unification and data fusion for composite measurement with contact and white light interferometric probes[J].Optics and Precision Engineering,2024,32(17):2698-2707.
CHENG Zhenying,XU Dongjian,ZHANG Chengyao,et al.Coordinate unification and data fusion for composite measurement with contact and white light interferometric probes[J].Optics and Precision Engineering,2024,32(17):2698-2707. DOI: 10.37188/OPE.20243217.2698.
Coordinate unification and data fusion for composite measurement with contact and white light interferometric probes