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Coordinate unification and data fusion for composite measurement with contact and white light interferometric probes
Precision Measurement and Sensing | 更新时间：2024-10-17

    • Coordinate unification and data fusion for composite measurement with contact and white light interferometric probes

    • “In the field of composite measurement, experts have proposed coordinate unification methods, designed new calibrators, achieved high-precision coordinate unification and data fusion, and improved device measurement capabilities.”
    • Optics and Precision Engineering   Vol. 32, Issue 17, Pages: 2698-2707(2024)

    • DOI：10.37188/OPE.20243217.2698    

      CLC： TH72

    • Received：10 May 2024，

      Revised：09 June 2024，

      Published：10 September 2024

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  • CHENG Zhenying,XU Dongjian,ZHANG Chengyao,et al.Coordinate unification and data fusion for composite measurement with contact and white light interferometric probes[J].Optics and Precision Engineering,2024,32(17):2698-2707. DOI： 10.37188/OPE.20243217.2698.

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