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Femtosecond laser annealing of 4H-SiC interfaces and optimization of their electrical performance
Modern Applied Optics | 更新时间：2026-09-11

    • Femtosecond laser annealing of 4H-SiC interfaces and optimization of their electrical performance

    • Optics and Precision Engineering   Vol. 32, Issue 19, Pages: 2889-2898(2024)

    • DOI：10.37188/OPE.20243219.2889    

      CLC： TN248

    • Received：23 April 2024，

      Revised：2024-06-22，

      Published：10 October 2024

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  • REN Yuqi,YUE Yunfan,LI Sheng,et al.Femtosecond laser annealing of 4H-SiC interfaces and optimization of their electrical performance[J].Optics and Precision Engineering,2024,32(19):2889-2898.

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