您当前的位置：
首页 >
文章列表页 >
Development of collimated focus coupled optical path for film thickness monitoring system
Modern Applied Optics | 更新时间：2026-09-11

    • Development of collimated focus coupled optical path for film thickness monitoring system

    • Optics and Precision Engineering   Vol. 33, Issue 1, Pages: 25-36(2025)

    • DOI：10.37188/OPE.20253301.0025    

      CLC： O484;TB43
    • CSTR：32169.14.OPE.20253301.0025    

    • Received：13 August 2024，

      Revised：2024-09-13，

      Published：10 January 2025

    移动端阅览

  • XIE Haifeng,FU Xiuhua,DONG Suotao,et al.Development of collimated focus coupled optical path for film thickness monitoring system[J].Optics and Precision Engineering,2025,33(01):25-36.

  •  
  •  

0

Views

622

下载量

1

CSCD

Alert me when the article has been cited
提交
Tools
Download
Export Citation
Share
Add to favorites
Add to my album

Related Articles

Research developments of extreme ultra-violet multilayers for 40-90 nm
Design of laser schlieren test system for mine gas / air premixed gas deflagration research
Design of laser schlieren test system for mine gas/air premixed gas deflagration
Strategies to overcome scale constraints for Chinese instrumentation companies
Coupling error modeling and correction of angular and translational stages in fiber coupling systems

Related Author

LAI Bo
JIANG Li
Qi Runze
WANG Zhanshan
HU Yang YIN Shangxian ARNTZEN J.Bjrn ZHU Jianfang LI Xuebing
Yang HU
Shang-xian YIN
J. Bjørn ARNTZEN

Related Institution

MOE Key Laboratory of Advanced Micro-structured Materials of Ministry of Education， Institute of Precision Optical Engineering （IPOE）， School of Physics Science and Engineering Tongji University
College of Security Engineering, North China Institute of Science and Technology
University of Bergen， Bergen
University of Bergen, Bergen
0