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Optimizing lapping plate rotational speed based on trajectory and pad wear uniformity
Micro\/Nano Technology and Fine Mechanics | 更新时间:2026-09-11
    • Optimizing lapping plate rotational speed based on trajectory and pad wear uniformity

    • Optics and Precision Engineering   Vol. 33, Issue 24, Pages: 3864-3874(2025)
    • DOI:10.37188/OPE.20253324.3864    

      CLC: TH161+.1;TG73
    • CSTR:32169.14.OPE.20253324.3864    
    • Received:13 October 2025,

      Revised:2025-11-19,

      Published:25 December 2025

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  • JIA Yufan,ZHU Xianglong,CHEN Jie,et al.Optimizing lapping plate rotational speed based on trajectory and pad wear uniformity[J].Optics and Precision Engineering,2025,33(24):3864-3874.

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