Post processing for magnetorheological finishing of optical mirrors

SONG Ci; DAI Yi-fan; PENG Xiao-qiang; SHI Feng

doi:10.3788/OPE.20101808.1715

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Post processing for magnetorheological finishing of optical mirrors

Article | 更新时间：2020-08-12

- Post processing for magnetorheological finishing of optical mirrors
- Optics and Precision Engineering Vol. 18, Issue 8, Pages: 1715-1721(2010)
- 作者机构：
  
  国防科学技术大学机电工程与自动化学院,湖南长沙 410073
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20101808.1715
  CLC： TQ171.684
- Received：05 November 2009，
  
  Revised：24 January 2010，
  
  Published Online：20 August 2010，
  
  Published：20 August 2010
- 稿件说明：
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宋辞, 戴一帆, 彭小强, 石峰. 光学镜面磁流变抛光的后置处理[J]. 光学精密工程, 2010,18(8): 1715-1721

SONG Ci, DAI Yi-fan, PENG Xiao-qiang, SHI Feng. Post processing for magnetorheological finishing of optical mirrors[J]. 光学精密工程, 2010,18(8): 1715-1721
宋辞, 戴一帆, 彭小强, 石峰. 光学镜面磁流变抛光的后置处理[J]. 光学精密工程, 2010,18(8): 1715-1721 DOI： 10.3788/OPE.20101808.1715.

SONG Ci, DAI Yi-fan, PENG Xiao-qiang, SHI Feng. Post processing for magnetorheological finishing of optical mirrors[J]. 光学精密工程, 2010,18(8): 1715-1721 DOI： 10.3788/OPE.20101808.1715.

摘要

分析了自行研制的磁流变抛光机床KDMRF-1000的拓扑结构以及坐标变换关系

对其进行了运动求解

建立了光学镜面的磁流变抛光后置处理算法模型。针对机床四轴联动的特点

对建立的磁流变抛光后置处理模型进行了近似处理。以球面镜的后置处理为例

推导了具有普适性的以光栅扫描方式加工光学镜面的后置处理算法

同时分析了这种近似处理引入的误差

仿真了其对不同口径和不同相对口径球面镜的影响

得到了这种近似处理算法对球面镜的加工范围。最后

对一块口径为200 mm

相对口径为1∶1.6的K9材料球面镜进行了磁流变抛光实验

在不考虑边缘效应的情况下其面形误差的PV值和RMS值分别达到了65 nm和9 nm以下

有效地验证了后置处理算法模型的准确性以及四轴联动近似处理的可行性。该算法对各类形状和大小的光学镜面加工均有参考意义。

Abstract

The topological structure and coordinate transformation of Magnetorheological Finishing (MRF) machine tool KDMRF-1000 were analyzed and its kinematics was calculated

then the post processing algorithm model of MRF for an optical lens was established. According to the characteristic of four-axis linkage machine tool

the model was treatmented approximately. By taking the post processing of a spherical lens as an example

a post processing algorithm that can be used for a raster tool path was deduced and the errors imported by this approximate treatment were analyzed. By simulating the effect of the algorithm on the spherical lenses with different apertures and relative apertures

the polishing range of this algorithm was achieved. Furthermore

a spherical part (K9

200 mm in diameter

=640 mm) was polished by MRF

experimental results show that obtained errors are less than 65 nm PV and 9 nm RMS in excluding the edge effect. This experiment proves the veracity of post processing algorithm and the feasibility of four-axis linkage approximate treatment. The work done in this paper has an important purpose for polishing the optical lenses with different apertures and shapes.

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references

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Related Institution

College of Mechatronics Engineering and Automation, Hu'nan Key Laboratory of Ultra-precision Machining Technology, National University of Defense Technology

School of Mechanical and Electrical Engineering, Harbin Institute of Technology2. 3. Research Center of Laser Fusion, China Academy of Engineering Physics

国防科学技术大学，机电工程与自动化学院，机电系，精密工程实验室2. 国防科大机电工程与自动化学院3. 国防科技大学机电工程与自动化学院机电系4. 湖南省长沙市国防科学技术大学机电工程与自动化学院机电系精密工程实验室

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