Computer-aided alignment of off-axis three-mirror system by using Zernike coefficients

GONG Dun; TIAN Tie-yin; WANG Hong

doi:10.3788/OPE.20101808.1754

您当前的位置：

首页 >

文章列表页 >

Computer-aided alignment of off-axis three-mirror system by using Zernike coefficients

Article | 更新时间：2020-08-12

- Computer-aided alignment of off-axis three-mirror system by using Zernike coefficients
- Optics and Precision Engineering Vol. 18, Issue 8, Pages: 1754-1759(2010)
- 作者机构：
  
  1. 中国科学院研究生院北京,100039
  2. 中国科学院长春光学精密机械与物理研究所光学系统先进制造技术中国科学院重点实验室,吉林长春 130033
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20101808.1754
  CLC： V248.3;TP391.7
- Received：14 May 2009，
  
  Revised：01 September 2009，
  
  Published Online：20 August 2010，
  
  Published：20 August 2010
- 稿件说明：
移动端阅览
巩盾, 田铁印, 王红. 利用Zernike系数对离轴三反射系统进行计算机辅助装调[J]. 光学精密工程, 2010,18(8): 1754-1759

GONG Dun, TIAN Tie-yin, WANG Hong. Computer-aided alignment of off-axis three-mirror system by using Zernike coefficients[J]. 光学精密工程, 2010,18(8): 1754-1759
巩盾, 田铁印, 王红. 利用Zernike系数对离轴三反射系统进行计算机辅助装调[J]. 光学精密工程, 2010,18(8): 1754-1759 DOI： 10.3788/OPE.20101808.1754.

GONG Dun, TIAN Tie-yin, WANG Hong. Computer-aided alignment of off-axis three-mirror system by using Zernike coefficients[J]. 光学精密工程, 2010,18(8): 1754-1759 DOI： 10.3788/OPE.20101808.1754.

摘要

针对离轴三反光学系统检测和装调的复杂性

提出了一套结合了干涉测量技术的计算机辅助装调方法。采用多视场ZYGO干涉仪自准干涉检验各种失调量产生的残余像差

得到表征系统失调量引起残余像差的一系列Zernike系数

利用Zernike系数与Seidel像差系数之间的相关性将之转化为几何像差作为校正对象。由光学设计软件求得与系统失调量相关的灵敏度矩阵

并确定对残余像差影响最敏感的失调量。当失调量被确定后

将调整后的结果再次代入光学设计软件进行验证。多次迭代后

得到系统的RMS值<0.04的良好结果

证明了这种指导装调的方法是行之有效的。

Abstract

A computer-aided alignment method in combining with the interferometry was proposed to optimize the detection and alignment of an off-axis three-mirror system.By using a multi-fields ZYGO interferometer

a series of Zernike coefficients were obtained to express the incorrect parameters of the system

which were then transformed into geometric aberrations as the corrected objects based on the dependence of Zernike-coefficents on Seidel aberrations.Furthermore

an optical design software was used to derive the sensitivity matrix related to the incorrect parameters and to determine the incorrect parameter mostly sensitive to the redual aberration. Consequently

the adjusted result was brought into the software to verify the selection of incorrect parameters.Experimental results show that the RMS value of the system is lower than 0.04 after iterations

which proves the effectiveness of the method in alignment guidance.

关键词

Keywords

references

崔继承. 大口径折反射式变焦距物镜的设计[J]. 光学精密工程,2008,16(11):2087-2091.

CUI J C. Design of large aperture refractive-reflective zoom lens[J]. Opt. Precision Eng., 2008,16(11):2087-2091.( in Chinese)

常军,翁志成,姜会林. 长焦距空间三反光学系统的设计[J]. 光学精密工程,2001,9(4):315-318.

CHANG J, WENG Z C, JIANG H L. Design of long focal length space optical system with three reflective mirror[J]. Opt. Precision Eng.,2001,9(4):315-318.(in Chinese)

史亚莉,高云国,邓伟杰. 反射光路的计算机辅助装调模型[J]. 激光与红外,2009,39(4):427-430.

SHI Y L,GAO Y G,DENG W J. Model for computer-aided alignment of reflective optical system[J].Laser & Infrared, 2009,39(4):427-430. (in Chinese)

FIGOSKI J W, SHRODET E, MOORE G F. Computer-aided alignment of a wide-field three-mirror, unobscured, high-resolution sensor[J].SPIE,1989,1049:166-177.

IRA M, EGDAL L. Manufacture of a three-mirror wide-field optical system[J].Optical Engineering, 1985, 24(2):285-292.

杨晓飞,张晓辉,韩昌元. ZEMAX软件在离轴三反射镜系统计算机辅助装调中的应用[J]. 光学精密工程, 2004,12(3):270-274.

YANG X F,ZHANG X H,HAN C Y. Application of Zemax software in alignment of three-mirror off-axis aspherical optical system[J]. Opt. Precision Eng., 2004,12(3):270-274.( in Chinese)

张斌,张晓辉,韩昌元. 光学系统计算机辅助装调中的一种优化算法[J]. 光学精密工程,2001,8(3):273-277.

ZHANG B, ZHANG X H, HAN C Y. Algorithm for misalignmental determination in computer-aided alignment of optical system[J].Opt. Precision Eng.,2001,8(3):273-277.(in Chinese)

罗淼,朱永田. 计算机辅助装调方法在离轴卡塞格林系统中的应用[J]. 光学技术,2008,34(4):514-517.

LUO M, ZHU Y T. Application of computer-aided alignment to off-axis cassegrain system[J]. Optical Technique,2008,34(4):514-517.(in Chinese)

CODE V.Optical Design Software Users Guide.version 9.5[M]. Pasadena: Optical Research Associates.2001.

MALACARA D. Optical Shop Testing[M]. New Jersey: John Wiley&Sons,Inc.1978.

Views

305

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Application of modified sensitivity matrix method in alignment of off-axis telescope

Design of fiber force sensors for surgical probes

Computer-aided alignment for large-aperture off-axis three mirrors optical system with artificially random air flow

Stress-free alignment of off-axis three-mirror system

Active laser detection of cat's eye effect for space-based off-axis three mirror optical system

Related Author

WANG Yang

HU Chun-hui

LI Xiao-bing

YAN Chang-xiang

GU Zhi-yuan

ZHU Lianqing

YU Changxin

HE Yanlin

Related Institution

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

University of Chinese Academy of Sciences

Changchun UP Optotech Co., Ltd.

Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument， Beijing Information Science and Technology University

Changchun Institute of Optics，Fine Mechanics and Physics，Chinese Academy of Sciences

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰