BAKKER A, HUIJSING J H. CMOS smart temperature sensor: an overview . Proceeding of the First IEEE Sensors Conference. Orlando, 2002:1423- 1427.

XU J, YOU B, LI X, et al.. Fully digital smart temperature sensor with quartz tuning fork resonator

. Opt. Precision Eng.,2009,17(4):1453- 1459.

GREGORY T A K. Micromachined transducers sourcebook

. Boston: The McGraw-Hill,1998.

MUTYALA M S K, BANDHANADHAM D, PAN L, et al..Mechanical and electronic approaches to improve the sensitivity of microcantilever sensors

. Acta Mechanica Sinica, 2009,25(1):1-12.

FRITZ J. Cantilever biosensors

. Analyst, 2008, 133(7):855-863.

梁晋涛,刘诗斌,刘君华,等. 碳纳米管压阻微悬臂梁红外热探测器

. 光学 精密工程,2008,16 (4):682-688. LIANG J T, LIU S B, LIU J H, et al.. Micro-cantilever thermal infrared detector with carbon nanotubes

. Opt. Precision Eng., 2008,16(4):682-688.(in Chinese)

袁江波,单小彪,谢涛,等. 悬臂梁单晶压电发电机的实验

. 光学 精密工程,2009,17 (5) :1072-1077. YUAN J B, SHAN X B, XIE T, et al.. Experiment of monocrystal piezoelectric generator with cantilever beam structure

. Opt. Precision Eng., 2009,17(5):1072-1077.(in Chinese)

阚君武,唐可洪,王淑云, 等. 压电悬臂梁发电装置的建模与仿真分析

. 光学 精密工程,2008,16 (1) :71-75. KAN J W, TANG K H, WANG S Y, et al.. Modeling and simulation of piezoelectric cantilever generators

. Opt. Precision Eng., 2008,16 (1):71-75.(in Chinese)

VOICULESCU I R, ZAGHLOU M E,MCGILL R A,et al..Modelling and measurements of a composite microcantilever beam for chemical sensing applications

. Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science,2006,220(10):1601- 1608.

PETERSEN K E. Dynamic micromechanics on silicon: Techniques and devices

. IEEE Trans. Electron Devices, 1978,25(12):1241- 1250.

BLEVINS R D. Formulas for natural frequency and mode shape

. The Journal of the Acoustical Society of America, 1980,67(5):1849- 1849.

TIMOSHENKO S. Analysis of bi-metal thermostats

. Journal of the Optical Society of America, 1925,11(3):233- 255.