Dynamic testing of MEMS micro-structure and its measurement system at low temperatures

SHE Dong-sheng; WANG Xiao-dong; ZHANG Xi-wen; WANG Li-ding

doi:10.3788/OPE.20101810.2178

您当前的位置：

首页 >

文章列表页 >

Dynamic testing of MEMS micro-structure and its measurement system at low temperatures

Article | 更新时间：2020-08-12

- Dynamic testing of MEMS micro-structure and its measurement system at low temperatures
- Optics and Precision Engineering Vol. 18, Issue 10, Pages: 2178-2184(2010)
- 作者机构：
  
  1. 大连理工大学精密与特种加工教育部重点实验室,辽宁大连,116023
  2. 辽宁省微纳米技术及系统重点实验室,辽宁大连 116024
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20101810.2178
  CLC： TH703;TH825
- Received：08 December 2009，
  
  Revised：10 March 2010，
  
  Published Online：28 October 2010，
  
  Published：20 October 2010
- 稿件说明：
移动端阅览
佘东生, 王晓东, 张习文, 王立鼎. 低温环境下MEMS微构件的动态特性及测试系统[J]. 光学精密工程, 2010,18(10): 2178-2184

SHE Dong-sheng, WANG Xiao-dong, ZHANG Xi-wen, WANG Li-ding. Dynamic testing of MEMS micro-structure and its measurement system at low temperatures[J]. Editorial Office of Optics and Precision Engineering , 2010,18(10): 2178-2184
佘东生, 王晓东, 张习文, 王立鼎. 低温环境下MEMS微构件的动态特性及测试系统[J]. 光学精密工程, 2010,18(10): 2178-2184 DOI： 10.3788/OPE.20101810.2178.

SHE Dong-sheng, WANG Xiao-dong, ZHANG Xi-wen, WANG Li-ding. Dynamic testing of MEMS micro-structure and its measurement system at low temperatures[J]. Editorial Office of Optics and Precision Engineering , 2010,18(10): 2178-2184 DOI： 10.3788/OPE.20101810.2178.

摘要

研究了微机电系统(MEMS)微构件的谐振频率等动态特性在低温环境下的变化规律

从理论上分析了改变环境温度对微悬臂梁谐振频率的影响

并对低温环境下微构件的动态特性测试技术进行了研究。研制了低温环境下MEMS动态特性测试系统

采用半导体冷阱实现低温环境

利用压电陶瓷作为底座激励装置的驱动源

通过底座的冲击激励

使微悬臂梁处于自由衰减振动状态

使用激光多普勒测振仪对微悬臂梁的振动响应进行检测

从而获得微悬臂梁的谐振频率。利用研制的测试系统

在-50 ℃~室温的环境下对单晶硅微悬臂的谐振频率进行了测试

结果表明

随着温度的降低

微悬臂梁的谐振频率略有增大

其谐振频率的温度变化率约为-0.263 Hz/K

与理论分析的结果基本一致。该测试装置能够有效地完成在-50 ℃~室温环境下微构件的动态特性测试。

Abstract

To investigate the dynamic characteristics of micro-structure in a Micro-electro-mechanical System(MEMS) at a low temperature environment

a theoretical model was established and the effect of environmental temperatures on the resonant frequency of a micro-cantilever was researched. Then

a dynamic testing system for MEMS at low temperature was developed. In testing

a thermoelectric cooling refrigerator was utilized to generate the low temperature environment and the piezoelectric ceramic was used as the driving source to establish the base excitation device. Through the base impact excitation

the resonance frequencies were obtained by analyzing the impulse response signals and the frequency response of micro-cantilever was tested by using a laser Doppler vibrometer. The dynamic testing experiments for the silicon micro-cantilever were carried out from -50 ℃ to room temperature. Obtained results show that the resonance frequency slightly increases with the decreasing temperature

and it is consistent with that of the theoretical analysis. The temperature dependency of frequency is about -0.263 Hz/K

which is a little smaller than that of the theoretical results. The measurement device is very effective to carry out dynamic testing of microstructures from -50 ℃ to room temperature.

关键词

Keywords

references

周兆英,叶雄英,崔天宏,等. 微米纳米技术及微型机电系统[J]. 光学精密工程,1998,6 (2):1-7. ZHOU Z Y,YE X Y,CUI T H,et al.. Microtechnology/Nanotechnology and MEMS [J]. Opt. Precision Eng.,1998,6(2):1-7. (in Chinese)[2] WEN H K. Trends and frontiers of MEMS [J]. Sensors and Actuators A,2007,136:62-67. [3] TANAKA M. An industrial and applied review of new MEMS device features [J]. Microelectronic Engineering,2007,84:1341-1344.[4] CHOA S H. Reliability of vacuum packaged MEMS gyroscopes [J]. Microelectronics Reliability,2005,45:361-369.[5] TANNER D M. MEMS reliability: where are we now? [J]. Microelectronics Reliability,2009,49:937-940.[6] RAITERI R,GRATTAROLA M,BUTT H J,et al.. Micromechanical cantilever-based biosensors [J]. Sensors and Actuators B,2001,79:115-126.[7] MERTEN J,FIONOT E,THUNDAT,et al.. Effects of temperature and pressure on microcantilever resonance response [J]. Ultramicroscopy.2003,97(1-4):119-126.[8] 王涛. 高g值环境典型微结构动态特性及其测试技术研究 . 大连:大连理工大学,2008:56-57. WANG T. Study on Dynamic Charaeteristics and Testing Technology of Microstrueture under High g-Force . Dalian: Dalian University of Technology,2008:56-57. (in Chinese)[9] LIN R M,WANG W J. Structural dynamics of Microsystems－current state of research and future directions [J]. Mechanical Systems and Signal Processing,2006,1015-1043.[10] 李智,王向军. 微机电系统测试技术及方法[J]. 光学精密工程,2003,11 (1):37-44. LI Z,WANG X J. MEMS measurement technologies and methods[J]. Opt. Precision Eng.,2003,11 (1):37-44. (in Chinese)[11] 王文亮,张文,罗惟德,等.结构动力学 [M]. 上海:复旦大学出版社. 1993. 245-251. WANG W L,ZHANG W,LUO W D, et al.. Dynamics of Structures [M].Shanghai: Fudan University Press. 1993. 245-251.(in Chinese)[12] PETERSEN K. Silicon as a mechanical materials [J]. Proceedings of IEEE on Electron Devices. 1982,70(5):420-457.[13] MCSKIMIN H J. Measurement of elastic constants at low temperature by means of ultrasonic waves data for silicon and germanium single crystals and for fused silica [J]. J.Appl.Phy. 1953,(24):988-997.

Views

261

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Thermoacoustic efficiency of graphene sound-generators using different structures

Fabrication of microscale axial symmetric three-dimensional curved shell resonators based on silicon isotropic wet etching

MEMS gyro denoising based on fuzzy interval threshold EMD

Development of capacitive MEMS vibrating ring gyroscope

Dynamic hysteresis modeling and experimental verification of piezoelectric positioning stage

Related Author

De-bo WANG

Xing-yue HE

Ji-hao XIN

Jing-bing DING

Wei-da CAO

Xu-ye ZHUANG

Bing-gen CHEN

Ping-hua LI

Related Institution

College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunication

East China Institute of Photo-Electronic IC

Automatic Control Research Institute, Lanzhou Jiaotong University

Gansu Provincial Key Laboratory of Traffic Information Engineering and Control

Science and Technology on Electronic Test & Measurement Laboratory, North University of China

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰