Co-simulation of MEMS and circuits in Zeni VLG

YUAN Wei-zheng; NIU Hao-bin; CHANG Hong-long; MA Bing-he

doi:10.3788/OPE.20101810.2206

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Co-simulation of MEMS and circuits in Zeni VLG

Article | 更新时间：2020-08-12

- Co-simulation of MEMS and circuits in Zeni VLG
- Optics and Precision Engineering Vol. 18, Issue 10, Pages: 2206-2211(2010)
- 作者机构：
  
  西北工业大学陕西省微/纳米系统重点实验室,陕西西安 710072
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20101810.2206
  CLC： TN710;TH703
- Received：08 March 2010，
  
  Revised：05 April 2010，
  
  Published Online：28 October 2010，
  
  Published：20 October 2010
- 稿件说明：
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苑伟政, 牛昊彬, 常洪龙, 马炳和. MEMS器件与电路共同仿真原型系统[J]. 光学精密工程, 2010,18(10): 2206-2211

YUAN Wei-zheng, NIU Hao-bin, CHANG Hong-long, MA Bing-he. Co-simulation of MEMS and circuits in Zeni VLG[J]. Editorial Office of Optics and Precision Engineering , 2010,18(10): 2206-2211
苑伟政, 牛昊彬, 常洪龙, 马炳和. MEMS器件与电路共同仿真原型系统[J]. 光学精密工程, 2010,18(10): 2206-2211 DOI： 10.3788/OPE.20101810.2206.

YUAN Wei-zheng, NIU Hao-bin, CHANG Hong-long, MA Bing-he. Co-simulation of MEMS and circuits in Zeni VLG[J]. Editorial Office of Optics and Precision Engineering , 2010,18(10): 2206-2211 DOI： 10.3788/OPE.20101810.2206.

摘要

为了预测MEMS器件与电路组成的完整MEMS系统的行为

建立了一个支持MEMS器件与电路共同仿真的原型系统。首先

根据MEMS系统级仿真与模拟电路仿真的共同特性

提出了MEMS器件与电路共同仿真的原理和方法

并依托国产电路仿真平台Zeni VLG建立了共同仿真原型系统的框架结构;然后

分别根据修正节点分析方法和模拟电路行为级建模方法开发了该共同仿真原型系统所必需的两个参数化模型库。通过一个跷跷板式微加速度计分别与其开环电路和闭环带载波电路的共同仿真对原型系统和模型库进行了测试

与国外商业软件Saber对比

开环仿真结果相对误差为2.1%

表明提出的原型系统能够有效进行MEMS器件与电路共同仿真

并且具有较高的精度。

Abstract

To predict the behaviors of the whole Micro-electro-mechanical System(MEMS) including MEMS devices and circuits

a prototype system for co-simulating MEMS devices and circuits was established. Firstly

the common characteristics of MEMS system-level simulation and analog circuit simulation were studied

and the principle and the method of co-simulating MEMS devices and circuits were presented. Based on the circuit simulation platform Zeni VLG

the frame of the prototype system was established. Then

two parametric model libraries which were essential for the prototype system were also established

respectively

according to the modified nodal analysis method and analog circuit behavioral modeling method. A seesaw accelerometer with an open-loop circuit and a closed-loop circuit was used to verify the system and the models.By comparing to the commercial software Saber

obtained results indicate that the relative error is 2.1% in the open-loop simulation. The simulation results show that the prototype system could handle co-simulations of MEMS devices and circuits effectively

and has a high accuracy.

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Keywords

references

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