Test and evaluation of wavefront phase of point diffraction

MA Dong-mei; CHEN Tu-quan

doi:10.3788/OPE.20101811.2390

您当前的位置：

首页 >

文章列表页 >

Test and evaluation of wavefront phase of point diffraction

Article | 更新时间：2020-08-12

- Test and evaluation of wavefront phase of point diffraction
- Optics and Precision Engineering Vol. 18, Issue 11, Pages: 2390-2397(2010)
- 作者机构：
  
  1. 中国科学院研究生院,北京 100039
  2. 中国科学院长春光学精密机械与物理研究所,吉林长春 130033
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20101811.2390
  CLC： O436.1;TH744.3
- Received：01 July 2010，
  
  Revised：06 August 2010，
  
  Published Online：25 November 2010，
  
  Published：25 November 2010
- 稿件说明：
移动端阅览
马冬梅, 陈土泉. 点衍射波前位相的测评[J]. 光学精密工程, 2010,18(11): 2390-2397

MA Dong-mei, CHEN Tu-quan. Test and evaluation of wavefront phase of point diffraction[J]. Editorial Office of Optics and Precision Engineering, 2010,18(11): 2390-2397
马冬梅, 陈土泉. 点衍射波前位相的测评[J]. 光学精密工程, 2010,18(11): 2390-2397 DOI： 10.3788/OPE.20101811.2390.

MA Dong-mei, CHEN Tu-quan. Test and evaluation of wavefront phase of point diffraction[J]. Editorial Office of Optics and Precision Engineering, 2010,18(11): 2390-2397 DOI： 10.3788/OPE.20101811.2390.

摘要

提出一种检测点衍射干涉仪关键部件针孔所产生的衍射光学波前的方法。介绍了点衍射波前的产生原理

分析了小孔质量状态、照明光路调整状态与波前各个像差分量之间的关系。基于信息光学基础理论

采用傅里叶变换和迭代算法

采集针孔衍射图像并进行计算分析

实现对衍射波前的位相复原以获得波前信息。阐述了测试方法的理论依据和计算公式

应用研制的位相复原分析计算软件测试并分析了实际采集的点衍射图像

通过15次的迭代

输出的位相值逐渐收敛

图像误差因子下降到0.12。目前

该方法已用于对针孔的筛选和针孔照明系统的装调中

实验结果证明了该测试方法的可行性。

Abstract

A testing method was proposed for the diffraction wavefront produced by a pinhole mounted in a point-diffraction interferometer. The producing principle of the point diffraction wavefront was presented

and the relation among the pinhole states

illumination adjustment and the wavefront aberration was analyzed. On the basis of the fundamental theory of information optics

the Fourier transform and an iterative algorithm were used to calculate and analyze the pinhole diffuse image

retrieve the phase of diffraction wavefront and then to obtain the wavefront information. The related theory was discussed and the measured point diffraction image was analyzed through a computing software of phase retrieval. Results indicate that the output phase tends to a convergence after about 15 iterations

and the image error factor has dropped to 0.12. The testing method has been applied to the selection of pinholes and the assembly of pinhole illumination systems

and experimental results prove that the testing method is valid.

关键词

Keywords

references

<td valign='top'>[1]袁琼雁,王向朝. 国际主流光刻机研发的最新进展[J]. 激光与光电子学进展, 2007,44(1):57-64. YUAN Q Y, WANG X Z. Recent development of international main-stream lithographic tools[J]. Laser & Optoelectronics Progress,2007,44(1):57-64. (in Chinese)<td valign='top'>[2]SEIJI T, OSAMU K, KENJI Y, et al..Visible light point-diffraction interferometer for testing of EUVL optics[J]. SPIE,2006,6151:61510E -1-61510E-8.<td valign='top'>[3]OTAKI K, YAMAMOTO T, FUKUDA Y, et al..Accuracy evaluation of the point diffraction interferometer for extreme ultraviolet lithography aspheric mirror[J]. Microelectronics and Nanometer Structures. 2002,20(1):295-300.<td valign='top'>[4]刘国淦,张学军,王权陡,等. 光纤点衍射干涉仪的技术研究[J]. 光学精密工程,2001,9(2):142-145. LIU G G, ZHANG X J, WANG Q D, et al.. Fiber point diffraction interferometer[J]. Opt. Precision Eng., 2001,9(2):142-145.(in Chinese)<td valign='top'>[5]韩昌元. 信息光学基础理论及其应用[M]. 长春: 长春出版社,1989. HANG CH Y. Fundamental Theoty and Application of Information Optics[M]. Changchun: Changchun Publishing House, 1989. (in Chinese)<td valign='top'>[6]BRUCH H D, DAVID L A, SCOTT J S, et al.. Phase retrieval algorithm for JWST flight and testbed telescope[J]. SPIE, 2006,6265:1-11.<td valign='top'>[7]马冬梅,陈土泉,刘志祥,等. 位相复原技术在光学成像质量测评中的应用 [J]. 光学精密工程,2009,17(12):2912-2918. MA D M, CHEN T Q, LIU Z X, et al.. Application of phase retrieval technology to evaluation of optical imaging system[J]. Opt. Precision Eng., 2009,17(12):2912-2918.<td valign='top'>[8]元波,陈洪斌,刘顺发. Zernike多项式波面拟合的回归分析方法[J]. 光学精密工程,2007,15(3):396-400. YUAN B, CHEN H B, LIU S F. Regression analysis of wavefront fitting using Zernike polynomial[J]. Opt. Precision Eng.,2007,15(3):396-400. (in Chinese)<td valign='top'>[9]KERR D, KAUFMANN G H, GALIZZI G E. Unwrapping of interferometric phase-fringe maps by discrete cosine transform [J]. Appl. Opt., 1996,35(5):810-816.<td valign='top'>[10]DANIEL M. Optical Shop Testing(Second edition)[M]. New York:John Wiley&Sons,Inc.,1992.<td valign='top'>[11]唐玉科, 何小海,陶青川. 基于泽尼克多项式的显微镜点扩展函数研究[J]. 光学学报,2009,29(1):169-175. TANG Y K, HE X H,TAO Q C. Research on the point spread function of microscope based on the zernike polynomials[J]. Acta Optica Sinica,2009,29(1):169-175.(in Chinese)<td valign='top'>[12]FIENUP J R. Reconstruction of an object from modulus of its Fourier transform[J].Optics Letters.1978,3(1):27-29<a href='http://dx.doi.org/10.1364/OL.3.000027' target='_blank'><img src='../../images/crossref.gif' width='41' height='15' border='0' /><td valign='top'>[13]OTAKI K, ZHU Y, ISHII M, et al..Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL[J]. SPIE, 2004,5193:182-190.<td valign='top'>[14]YOSHIUKI S, AKIYOSHI S, MASANOBU H, et al..Wave-front errors of reference spherical waves in high-numerical aperture point diffraction interferometers[J]. J.Vac.Sci.Technol.B, 2004,22(1):104-108.

Views

785

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Fuzzy C-means clustering algorithm based on adaptive neighbors information

Multi-regularization image restoration method for X-ray images of integrated circuit

Measuring multi-surface shape by Fourier transform

Reflective shearing point diffraction interferometer for phase defect measurement

Detection of periodic microstructure defect based on optical Fourier transform

Related Author

CAO Chao

ZHU Qingyuan

GAO Yunlong

LI Jianpeng

ZHENG Xingshen

SHAO Guifang

MA Ge

LIN Sen

Related Institution

Third Institute of Oceanography， Ministry of Natural Resources

Department of Automation， Xiamen University

Tung Sah Institute of Micro-Nano Science and Technology， Xiamen University

School of Mechanical and Electrical Engineering， Guangzhou University

College of Electronic Information, Hangzhou Dianzi University

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰