Implementation and experiments of micromechanical differential silicon resonant accelerometer

SHI Ran; QIU An-ping; SU Yan

doi:10.3788/OPE.20101812.2583

您当前的位置：

首页 >

文章列表页 >

Implementation and experiments of micromechanical differential silicon resonant accelerometer

Article | 更新时间：2020-08-12

- Implementation and experiments of micromechanical differential silicon resonant accelerometer
- Optics and Precision Engineering Vol. 18, Issue 12, Pages: 2583-2589(2010)
- 作者机构：
  
  南京理工大学 MEMS惯性技术研究中心,江苏南京,210094
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20101812.2583
  CLC： TH824.4
- Received：12 March 2010，
  
  Revised：28 May 2010，
  
  Published Online：25 December 2010，
  
  Published：25 December 2010
- 稿件说明：
移动端阅览
石然, 裘安萍, 苏岩. 硅微谐振式加速度计的实现及性能测试[J]. 光学精密工程, 2010,18(12): 2583-2589

SHI Ran, QIU An-ping, SU Yan. Implementation and experiments of micromechanical differential silicon resonant accelerometer[J]. Editorial Office of Optics and Precision Engineering, 2010,18(12): 2583-2589
石然, 裘安萍, 苏岩. 硅微谐振式加速度计的实现及性能测试[J]. 光学精密工程, 2010,18(12): 2583-2589 DOI： 10.3788/OPE.20101812.2583.

SHI Ran, QIU An-ping, SU Yan. Implementation and experiments of micromechanical differential silicon resonant accelerometer[J]. Editorial Office of Optics and Precision Engineering, 2010,18(12): 2583-2589 DOI： 10.3788/OPE.20101812.2583.

摘要

为了提高硅微谐振式加速度计性能

从一种基于DDSOG(Deep Dry Silicon on Glass)工艺的硅微谐振式加速度计样机入手

介绍了加速度计的结构、加工方法和接口电路。该谐振式加速度计结构包括敏感质量块、谐振器和微杠杆3部分

采用差动结构来减小共模误差的影响。接口电路中采用了自动增益控制电路来稳定谐振器的振幅

成功实现了谐振器的闭环自激振荡和频率检测。分析了谐振式加速度计频率输出与加速度输入的关系

测试了硅微谐振式加速度计样机性能

结果为量程50

标度因数143 Hz/

零偏稳定性1.2 m

零偏重复性0.88 m

阈值170

。文章最后提出

DDSOG工艺中采用的玻璃材料和硅材料温度系数不同

影响了加速度计的温度特性

因此需要进步一改进加工工艺。

Abstract

To improve the performance of MEMS accelerometers

a micromechanical Silicon Resonant Accelerometer (SRA) prototype fabricated by Deep Dry Silicon on Glass (DDSOG) process was introduced

and some experiments for the accelerometer were performed. The structure

processing methods and the interface circuit of SRA were discribed in detail. The SRA adopted the differential structure composed of two identical resonators to eliminate common mode errors

and used the micro lever mechanism to magnify the scale factor. An interface circuit using the Automatic Gain Control (AGC) circuit was designed to maintain the oscillator stability

which could drive the resonator to achieve self-oscillation and to detect the frequency output. The relation between input acceleration and SRA frequency output was researched and the performance parameters of the prototype resonant accelerameter were tested. The test results show these performance parameters to be the sensitivity in 143 Hz/

input range in 50

bias stability in 1.2 m

bias repeatability in 0.88 m

and the threshold in 170

. Moreover

it is found that the temperature coefficient of glass substrate is larger than that of the silicon structure in the DDSOG process

which affects the bias temperature sensitivity of resonators. Therefore

it points out that the processing method should be improved further.

关键词

Keywords

references

HOPKINS R E, BORENSTEIN J T. The silicon oscillating accelerometer: a MEMS inertial instrument for strategic missile guidance . The Missile Sciences Conference, 2000:45-51.[2] SEOK S, KIM H, CHUN H. An inertial-grade laterally-driven MEMS differential resonant accelerometer . IEEE Sensors Conference, Vienna, 2004:654-657.[3] 裘安萍,庄瑞芬,施芹. 硅微谐振式加速度计结构设计与仿真[J]. 中国惯性技术学报,2009,17(1):93-97. QIU A P, ZHUNG R F, SHI Q. Structure design and simulation of micromechanical silicon oscillating accelerometer [J]. Journal of Chinese Inertial Technology, 2009,17(1):93-97.(in Chinese)[4] 庄瑞芬.硅微谐振式加速度计结构设计技术研究 . 南京:南京理工大学,2009. ZHUNG R F. Structure design of silicon MEMS resonant accelerometer . Nanjing:Nanjing University of Science & Technology, 2009.(in Chinese)[5] 李锦明.电容式微机械陀螺仪设计[M]. 北京:国防工业出版社,2006. LI J M. Design of Capacitive MEMS Gyroscope [M]. Beijing: National Defense Industry Press, 2006.(in Chinese)[6] ROESSIG T A. Integrated MEMS tuning fork oscillators for sensor applications . Berkeley: University of California, UMI, 1998.[7] CENK A, ANDREI S. MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness [M].New York:Springer, 2008.[8] 赵声衡,赵英.晶体振荡器[M]. 北京:科学技术出版社,2008.ZHAO S H, ZHAO Y. Crystal Oscillator [M]. Beijing: Science Press, 2008.(in Chinese)[9] 施芹,裘安萍,苏岩,等.硅微机械陀螺仪的机械耦合误差分析 [J].光学精密工程,2008,16(5):893-898. SHI Q, QIU A P, SU Y, et al.. Mechanical coupling error of silicon microgyroscope [J]. Opt. Precision Eng., 2008,16(5): 893-898.(in Chinese)[10] ROESSIG T A, HOWE R T, PISANO A P, et al.. Surface-micromachined resonant accelerometer .1997 International Conference on Solid-State Sensors and Actuators, Chicago,1997,6:859-862.[11] JIA Y B, HAO Y L, ZHANG R. Double tuning-fork resonant accelerometer [J]. IEEE Sensor Journal, 2004,4(8):1812-1815.[12] WOJCIECHOWSKI K E, BOSER B E, PISANO A P. A MEMS resonant strain sensor operated in air . Proc. 17th Int. IEEE Micro Electro Mech. Syst. Conf., 2004,1:841-845. [13] 李建利,房建成,盛蔚,等. 双质量块调谐输出式硅MEMS陀螺仪 [J]. 光学精密工程,2008,16(3):484-491. LI J L, FANG J C, SHENG W, et al.. Calculation and simulation of silicon MEMS gyroscope with dual-mass resonant output [J]. Opt. Precision Eng., 2008,16(3):484-491.(in Chinese)[14] 施芹,苏岩,裘安萍,等. MEM陀螺仪器件级真空封装技术 [J]. 光学精密工程,2009,17(8):1987-1992. SHI Q, SU Y, QIU A P, et al.. Device level vacuum packaging technologies of MEMS gyroscopes [J]. Opt. Precision Eng., 2009,17(8):1987-1992.(in Chinese)

Views

882

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Implementation and measurement of a miniaturized silicon resonant accelerometer

Design and fabrication of bulk micromachined tunneling gyroscope with fan-shaped comb drivers

MEMS resonators and filters in RF systems

Related Author

Jian ZHAO

Qin SHI

Guo-ming XIA

An-ping QIU

Zhi-qiang WU

Yan SU

WANG Ling-yun

LI Wen-wang

Related Institution

MEMS Inertial Technology Research Center, Nanjing University of Sci. & Tech.

Department of Mechanical and Electrical Engineering, Xiamen University, Fujian 361005, China

Institute of MOEMS, Chongqing University of Posts and Telecommunications

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰