Digital microfluidic chip by electrostatic manipulation in low voltage

LIU Xiang; GAO Hua-min; LI Tie; ZHOU Ping; WANG Yue-lin

doi:10.3788/OPE.20111901.0097

您当前的位置：

首页 >

文章列表页 >

Digital microfluidic chip by electrostatic manipulation in low voltage

Article | 更新时间：2020-08-12

- Digital microfluidic chip by electrostatic manipulation in low voltage
- Optics and Precision Engineering Vol. 19, Issue 1, Pages: 97-102(2011)
- 作者机构：
  
  1. 中国科学院研究生院,北京 100049
  2. 中国科学院上海微系统与信息技术研究所传感技术联合国家重点实验室,上海 200050
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20111901.0097
  CLC： TN303
- Received：09 March 2010，
  
  Revised：12 April 2010，
  
  Published Online：22 January 2011，
  
  Published：22 January 2011
- 稿件说明：
移动端阅览
刘翔, 皋华敏, 李铁, 周萍, 王跃林. 低电压下静电力驱动的数字微流控芯片[J]. 光学精密工程, 2010,19(1): 97-102

LIU Xiang, GAO Hua-min, LI Tie, ZHOU Ping, WANG Yue-lin. Digital microfluidic chip by electrostatic manipulation in low voltage[J]. Editorial Office of Optics and Precision Engineering, 2010,19(1): 97-102
刘翔, 皋华敏, 李铁, 周萍, 王跃林. 低电压下静电力驱动的数字微流控芯片[J]. 光学精密工程, 2010,19(1): 97-102 DOI： 10.3788/OPE.20111901.0097.

LIU Xiang, GAO Hua-min, LI Tie, ZHOU Ping, WANG Yue-lin. Digital microfluidic chip by electrostatic manipulation in low voltage[J]. Editorial Office of Optics and Precision Engineering, 2010,19(1): 97-102 DOI： 10.3788/OPE.20111901.0097.

摘要

设计并制作了一种基于静电力驱动的数字微流控芯片

用于构建芯片实验室。介绍了静电力驱动原理和芯片制作工艺流程

搭建了驱动检测实验平台。该芯片采用硅作衬底

氧化硅作绝缘层

TiW/Au为驱动电极阵列

氮化硅作介质层

碳氟聚合物为疏水层。由于采用开放式的结构

只需单层共平面控制电极

简化了工艺流程

优化了器件结构;而驱动电极阵列嵌入在氧化硅中

改善了减小介质层厚度时介质层对金属的台阶覆盖性

减少了电极边沿突起引起的边界击穿。另外

采用较薄的高质量介质层和疏水性能好的疏水膜层

大大降低了液滴驱动电压。实验显示

在20 V驱动电压下

该工艺可实现液滴按程序设定方式在二维平面内流畅运动

最大运动速度达96 mm/s。提出的芯片制作工艺简单

与IC工艺兼容

可应用于生化分析芯片实验室系统。

Abstract

A digital microfluidic chip by electrostatic manipulation was designed and fabricated for a micro total analysis system. The principle of the electrostatic manipulation was proposed and the fabrication processes and experimental platform were demonstrated. For the chip

the silicon was taken as a substrate

a silicon oxide film as the insulating layer

a TiW/Au film as the electrode array

a Si

film as the dielectric layer

and the fluorocarbon polymer as the hydrophobic layer. With an open structure instead of complex sandwich structure

the chip just needed a coplanar controlling electrode with one layer

so the process was simplified greatly. As the electrode array was embeded in the SiO

the electric leakage from poor step coverage and dielectric breakdown at the margin were prevented.Furthermore

with thin dielectric layer and fine hydrophobic layer

the manipulating voltage was reduced greatly. Experiments show that

by controlling the sequence of voltage to the electrode array

the droplet can be transported smoothly in the two-dimension planes with a programmable manner at a low voltage of 20 V

and the maximum speed has reached 96 mm/s. The digital microfluidic chip can be used in a Lab-on-chip due to its simple structure and IC compatible fabrication processes.

关键词

Keywords

references

HARRISON D J, MANZ A, FAN Z H, et al.. Capillary electrophoresis and sample injection systems integrated on a planar glass chip [J]. Analytical Chemistry, 1992,64(17):1926-1932.[2] WEST J, BECKER M, TOMBRINK S, et al.. Micro total analysis systems: latest achievements [J]. Analytical Chemistry,2008,80(12):4403-4419.[3] 刘冲,梁勇,李经民,等. 微流控芯片操作机器人碰撞保护装置的设计[J]. 光学精密工程, 2009,17(1):138-144. LIU C, LIANG Y, LI J M, et al.. Design of collision protection system of handling robot for microfluidic chip [J]. Opt. Precision Eng., 2009,17(1):138-144. (in Chinese)[4] MARK D, HAEBERLE S, ROTH G, et al.. Microfluidic lab-on-a-chip platforms: requirements, characteristics and applications [J]. Chemical Society Reviews, 2010,39:1153-1182.[5] 叶芳,黎毅力,张建辉. Y形流管无阀压电泵驱动器的动态研究[J]. 光学精密工程, 2008,16(12):2358-2365. YE F, LI Y L, ZHANG J H. Dynamic research on actuator for valveless piezoelectric pump with Y-shape tubes [J]. Opt. Precision Eng., 2008,16(12):2358-2365. (in Chinese)[6] 廖锡昌,郑慧斐,袁敏,等. 发光二极管诱导荧光微芯片分析检测器的研制[J]. 光学精密工程, 2009,17(12):2906-2911. LIAO X CH, ZHENG H F, YUAN M, et al.. High-power light-emitting-diode induced fluorescence detector for microfluidic chip analysis [J]. Opt. Precision Eng., 2009,17(12):2906-2911. (in Chinese)[7] PIYASENA M E, NEWBY R, MILLER T J, et al.. Electroosmotically driven microfluidic actuators [J]. Sensors and Actuators B, 2009,141:263-269.[8] SCHWARTZ J H, VYKOUKAL J V, GASCOY-NE P R C. Droplet-based chemistry on a programmable micro-chip [J]. Lab on a Chip,2004,4:11-17.[9] XIA H M, WAN S Y M, CHU C, et al.. Chaotic micromixers using two-layer crossing channels to exhibit fast mixing at low Reynolds numbers [J]. Lab on a Chip, 2005,5:748-755.[10] LUO J K, FU Y Q, LI Y, et al.. Moving-part-free microfluidic systems for lab-on-a-chip [J]. Journal of Micromechanics and Microengineering, 2009,19:054001(14pp).[11] WHEELER A R. Putting electrowetting to work [J]. Science, 2008,322(5901):539-540.[12] FAN S K, HUANG P W, WANG T T, et al.. Cross-scale electric manipulations of cells and droplets by frequency-modulated dielectrophoresis and electrowetting [J]. Lab on a Chip, 2008,8:1325-1331.[13] LEBRASSEUR E, AL-HAQ M I, CHOI W K, et al.. Two-dimensional electrostatic actuation of droplets using a single electrode panel and development of disposable plastic film card [J]. Sensors and Actuators A, 2007,136:358-366.[14] KAWAMOTO H, HAYASHI S. Fundamental investigation on electrostatic travelling-wave transport of a liquid drop [J]. Journal of Physics D: Applied Physics, 2006,39:418-423.[15] MOON H, CHO S K, GARRELL L, et al.. Low voltage electrowetting-on-dielectric [J]. Journal of Applied Physics, 2002,92:4080-4087.

Views

656

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Effect of magnetic field and target-substrate distance on properties of CrAlN films

Nano-reinforced substrate integration in SERS microfluidic chip for bacteria detection

Design of high throughput droplet generation chip

Experimental study on grinding technology of microchannel for self-driven detection chip

Experimental measurement of the penetration of a droplet into a granular medium using laser and fluorescence

Related Author

LIU Qingyun

LI Zhixiong

MEI Shiyang

ZHENG Jinhua

Yi XU

Li CHEN

Chuang GE

Hong HE

Related Institution

China Institute of Atomic Energy

Henan Jinghua Membrane Technology Vacuum Technology Co.， Ltd.

Engineering Research Center of Energy-saving Technology &Equipment of Thermal Energy System of the Ministry of Education， School of Mechanical and Power Engineering， Zhengzhou University

Key Laboratory of Translational Research for Cancer Metastasis and Individualized Treatment， Chongqing University Cancer Hospital

School of Optoelectronic Engineering， Chongqing University

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰