Measurement of large aspheric mirrors by non-null testing

WANG Xiao-kun; WANG Li-hui; DENG Wei-jie; ZHENG Li-gong

doi:10.3788/OPE.20111903.0520

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Measurement of large aspheric mirrors by non-null testing

Article | 更新时间：2020-08-12

- Measurement of large aspheric mirrors by non-null testing
- Optics and Precision Engineering Vol. 19, Issue 3, Pages: 520-528(2011)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所中国科学院光学系统先进制造技术重点实验室, 吉林长春 130033
  2. 中国移动通信集团吉林有限公司长春分公司, 吉林长春 130033
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20111903.0520
  CLC： TH703;TQ171.6+5
- Received：29 April 2010，
  
  Revised：04 May 2010，
  
  Published Online：22 March 2011，
  
  Published：22 March 2011
- 稿件说明：
移动端阅览
王孝坤, 王丽辉, 邓伟杰, 郑立功. 用非零位补偿法检测大口径非球面反射镜[J]. 光学精密工程, 2011,19(3): 520-528

WANG Xiao-kun, WANG Li-hui, DENG Wei-jie, ZHENG Li-gong. Measurement of large aspheric mirrors by non-null testing[J]. Editorial Office of Optics and Precision Engineering, 2011,19(3): 520-528
王孝坤, 王丽辉, 邓伟杰, 郑立功. 用非零位补偿法检测大口径非球面反射镜[J]. 光学精密工程, 2011,19(3): 520-528 DOI： 10.3788/OPE.20111903.0520.

WANG Xiao-kun, WANG Li-hui, DENG Wei-jie, ZHENG Li-gong. Measurement of large aspheric mirrors by non-null testing[J]. Editorial Office of Optics and Precision Engineering, 2011,19(3): 520-528 DOI： 10.3788/OPE.20111903.0520.

摘要

研究了利用圆形子孔径拼接和环形子孔径拼接检测非球面的方法

以实现非零位补偿法对大口径非球面的测量。分析和研究了该技术的基本原理

并基于齐次坐标变换和最小二乘拟合建立了综合优化和误差均化的拼接数学模型;分别开发了圆形子孔径拼接和环形子孔径拼接检测非球面的算法软件;设计和搭建了子孔径拼接干涉检测装置

并分别利用圆形子孔径拼接和环形子孔径拼接实现了对一口径为350 mm的双曲面的检测。对待测非球面进行了零位补偿检测实验

结果显示

圆形子孔径拼接与全口径补偿测量结果的PV值和RMS值的偏差分别为0.031和0.004;环形子孔径拼接与全口径补偿测量结果的PV值和RMS值的偏差分别为0.028和0.006;3种方法测量所得的面形分布都是一致的。所提出的方法提供了除零位补偿检测外的另一种定量测试大口径非球面的手段。

Abstract

Circular Subaperture Stitching Interferometry (CSSI) and Annular Subaperture Stitching Interferometry(ASSI) were expounded to realize the test of large aspheric surfaces without the null optics. The theories and principle of the technique were analysised

and the synthetical optimization stitching model and an effective stitching algorithm were established based on homogeneous coordinate transformation and simultaneous least-squares fitting. The softwares of CSSI and ASSI were devised

respectively

then the experiment was carried out for a

350 mm hyperboloid by CSSI

ASSI and a null test

respectively.Experiments show that the differences of PV and RMS errors between null test and CSSI are 0.031 and 0.004

and those between null test and ASSI are 0.028 and 0.006

respectively

while their synthesized surface maps are consistent to the entire surface map from the null test. The technique proposed in this paper provides another quantitive measurement for testing large aperture aspheres besides the null-compensation method.

关键词

Keywords

references

MALACARA D. Optical Shop Testing[M]. 2nd ed. New York: J.Wiley&Sons,1992.[2] HUXFORD R B. Wide FOV head mounted display using hybrid optics[J].SPIE, 2004,5249:230-237.[3] 许英朝,周平,张新. 三次位相传播中的波像差及在CGH中衍射级次的分离[J]. 光学精密工程,2008, 16(11): 2104-2109. XU Y CH, ZHOU P, ZHANG X. Wavefront aberration of cubic phase in propagation and order separation by computer generated hologram [J]. Opt. Precision Eng., 2008,16(11):2104-2109. (in Chinese)[4] 薛栋林,张忠玉,郑立功. 大口径碳化硅材料凸非球面反射镜的检验[J].光学精密工程, 2008, 16(12): 2491-2496. XUE D L, ZHANG ZH Y, ZHENG L G. Testing methods for large aperture convex SiC asphere mirror [J]. Opt. Precision Eng., 2008, 16(111):2008,16(12):2491-2496. (in Chinese)[5] KIM C J.Polynomial fit of interferograms[J].Appl.Opt,1982,21(24):4521-4525.[6] TRICARD M,SHOREY A,HALLOCK B, et al.. Cost-effective,subaperture approaches to finishing and testing astronomical optics[J]. SPIE,2006,6273:62730L-1-62730L-1.[7] MURPHY P, FLEIG J,FORBES G. Subaperture stitching interferometry for testing mild aspheres[J].SPIE,2006,6293:62930J-1-62930J-10.[8] CHEN M Y, GUO H W, YU Y J, et al.. Recent developments of multi-aperture overlap-scanning technique[J]. SPIE, 2003,5180:393-401.[9] 张蓉竹.ICF系统光学元件高精度波前检测技术研究 . 成都:四川大学,2003. ZHANG R ZH.Studies on High-accuracy Wavefront Test Techniques of Optical Components in ICF .Chengdu:Si Chuan university,2003,4. (in Chinese)[10] HOU X, WU F, YANG L, et al.. Comparison of annular wavefront interpretation with Zernike circle polynomials and annular polynomials[J]. Appl.Opt, 2006,45(35):8893-8901.[11] 王孝坤, 王丽辉,张学军. 子孔径拼接干涉法检测非球面[J]. 光学精密工程,2007,15(2):527-532. WANG X K, WANG L H, ZHANG X J. Testing asphere by subaperture stitching interferometric method[J]. Opt. Precision Eng., 2007,15(2):192-198. (in Chinese)[12] WANG X K, ZHENG L G, ZHANG B Z, et al.. Test of an off-axis asphere by subaperture stitching interferometry[J]. SPIE, 2009,7283:72832J-1- 72832J-6.[13] ZHAO C Y, BURGE J H. Stitching of off-axis sub-aperture null measurements of an aspheric surface[J].SPIE, 2008,7063:7063-1-7.

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