Generation and suppression of stray light in UV-vis spectrometer based on micro-silicon-slit

LI Hai-wen; HAO Peng; WU Yi-hui

doi:10.3788/OPE.20111904.0737

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Generation and suppression of stray light in UV-vis spectrometer based on micro-silicon-slit

Article | 更新时间：2020-08-12

- Generation and suppression of stray light in UV-vis spectrometer based on micro-silicon-slit
- Optics and Precision Engineering Vol. 19, Issue 4, Pages: 737-742(2011)
- 作者机构：
  
  1. 中国科学院苏州生物医学工程技术研究所,江苏苏州,中国,215163
  2. 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春,130033
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20111904.0737
  CLC： O433.1;TH744.3
- Received：09 January 2010，
  
  Revised：25 March 2010，
  
  Published Online：26 April 2011，
  
  Published：26 April 2011
- 稿件说明：
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黎海文, 郝鹏, 吴一辉. 微硅狭缝紫外-可见光谱仪杂散光的产生与抑制[J]. 光学精密工程, 2011,19(4): 737-742

LI Hai-wen, HAO Peng, WU Yi-hui. Generation and suppression of stray light in UV-vis spectrometer based on micro-silicon-slit[J]. Editorial Office of Optics and Precision Engineering, 2011,19(4): 737-742
黎海文, 郝鹏, 吴一辉. 微硅狭缝紫外-可见光谱仪杂散光的产生与抑制[J]. 光学精密工程, 2011,19(4): 737-742 DOI： 10.3788/OPE.20111904.0737.

LI Hai-wen, HAO Peng, WU Yi-hui. Generation and suppression of stray light in UV-vis spectrometer based on micro-silicon-slit[J]. Editorial Office of Optics and Precision Engineering, 2011,19(4): 737-742 DOI： 10.3788/OPE.20111904.0737.

摘要

采用MEMS技术

研制了一种基于微硅狭缝的紫外-可见光谱仪。介绍了该光谱仪的系统组成

分析了其杂散光的产生原因

着重讨论了光谱仪的关键部件-微硅狭缝的直线度、厚度与杂散光之间的关系

并对狭缝直线度产生的杂散光进行了实验验证。针对以卤钨灯为光源的紫外-可见光谱仪进行测量时

紫外部分能量低

杂散光严重的问题

提出一种组合滤光片法

通过在入射狭缝前和探测器前增加双重滤光片

平衡紫外-可见光范围内各谱段的光波强度

抑制紫外波长处杂散光的影响。实验结果表明:采用组合滤光片法抑制杂散光后

杂散光降低为抑制前的23%。

Abstract

A UV-visible spectrometer based on a micro-silicon-slit was developed by using the Micro-electro-mechanical System(MEMS) technology. The generated reasons of the stray-light from the UV-visible spectrometer were analyzed and the relationships between the straightness and thickness of micro-silicon-slit with the stray-light were discussed. Then

an experimental verification was carried out for the stray-light caused by the slit straightness. Furthermore

a new combining filter method was proposed to solve the problem that the radiation power of UV region is much lower than that of visible light region and it is seriously affected by the stray-light when the spectra are measured by a spectrometer with the halogen tungsten light source. The method combines a neutral density filter and a balanced filter in the front of the micro-silicon-slit and the detector to balance the radiation powers of different spectral regions and to inhibit the stray-light of UV spectrometer. It is shown that the stray-light of the UV-visible spectrometer has been reduced by 23% as compared with that by using the traditional method.

关键词

Keywords

references

鞠挥,吴一辉. 微型光谱仪的发展现状[J]. 光学精密工程,2001,9(4):372-376. JU H,WU Y H.The State of the art of micro spectrometers[J].Opt. Precision Eng.,2001,9(4):372-376.(in Chinese)[2] 周连群,吴一辉,张平,等. 基于MEMS 技术的微型分光光度计[J]. 光学精密工程,2006,14(6):990-997. ZHOU L Q, WU Y H, ZHANG P, et al.. Micro-spectrophotometer based on MEMS technology [J]. Opt. Precision Eng.,2006,14(6):990-997. (in Chinese)[3] 李昌厚. 紫外可见分光光度计[M]. 北京:化学工业出版社,2004. LI CH H. UV -VIS Spectrophotometer [M]. Beijing: Chemical Industry Press, 2004. (in Chinese)[4] SHARPE M R, IRISH PYE D,LTD U. Stray light in diffraction grating monochromators[J]. Journal of Modern Optics,25(9):861-893.[5] PENCHINA C M. Reduction of stray light in in-plane grating spectrometers [J]. Appl. Opt. 1967,6(6):1029-1031.[6] ZONG Y Q, STEVEN W, BROWN B,et al.. Simple spectral stray light correction method for array spectroradiometers[J].Appl. Opt., 2006,45:1111-1119.[7] 沈海平,潘建根,冯华君,等. 发光二极管光谱测量中的杂散光与带宽校正[J]. 光谱学与光谱分析,2009,29(6):1493-1496. SHEN H P, PAN J G, FENG H J, et al.. Stray light and bandpass correction in the spectral measurement for light emitting diodes [J]. Spectroscopy and Spectral Analysis, 2009,29(6):1493-1496.[8] 郁道银,谈恒英.工程光学[M]. 机械工业出版社,2003. YU D Y, TAN H Y. Engineering Optics [M]. Beijing: Mechanical Industry Press, 2003. (in Chinese)[9] 黄梅珍,倪一,林峰,等. 高速紫外-可见分光光度计的研制[J]. 光谱学与光谱分析,2005, 25(6):938-941. HUANG M ZH, NI Y, LIN F, et al.. Development of high speed UV-Vis spectrophotometer [J]. Spectroscopy and Spectral Analysis, 2005,25(6):938-941. (in Chinese)[10] 周连群,吴一辉,张平,等. 一种采用微硅片狭缝的新型微小型光纤光谱仪[J]. 光学精密工程,2005,13(6):637-642. ZHOU L Q, WU Y H, ZHANG P, et al.. A new mini-fiber-spectrometer by adopting micro-silicon-slit [J]. Opt. Precision Eng., 2005,13(6):6372642. (in Chinese)

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