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Micro energy director array for ultrasonic precise sealing of polymer MEMS device
Article | 更新时间:2020-08-12
    • Micro energy director array for ultrasonic precise sealing of polymer MEMS device

    • Optics and Precision Engineering   Vol. 19, Issue 4, Pages: 754-761(2011)
    • DOI:10.3788/OPE.20111904.0754    

      CLC: TB559
    • Received:31 August 2010

      Revised:27 October 2010

      Published Online:26 April 2011

      Published:26 April 2011

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  • LUO Yi, ZHANG Miao-miao, SUN Yi-bo, WANG Xiao-dong. Micro energy director array for ultrasonic precise sealing of polymer MEMS device[J]. Editorial Office of Optics and Precision Engineering, 2011,19(4): 754-761 DOI: 10.3788/OPE.20111904.0754.

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