Application of microlever to micromechanical silicon resonant accelerometers

SHI Ran; JIANG Shao-dong; QIU An-ping; SU Yan

doi:10.3788/OPE.20111904.0805

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Application of microlever to micromechanical silicon resonant accelerometers

Article | 更新时间：2020-08-12

- Application of microlever to micromechanical silicon resonant accelerometers
- Optics and Precision Engineering Vol. 19, Issue 4, Pages: 805-811(2011)
- 作者机构：
  
  南京理工大学 MEMS惯性技术研究中心,江苏南京,210094
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20111904.0805
  CLC： TH824.4
- Received：21 July 2010，
  
  Revised：26 August 2010，
  
  Published Online：26 April 2011，
  
  Published：26 April 2011
- 稿件说明：
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石然, 姜劭栋, 裘安萍, 苏岩. 微杠杆在硅微谐振式加速度计中的应用[J]. 光学精密工程, 2011,19(4): 805-811

SHI Ran, JIANG Shao-dong, QIU An-ping, SU Yan. Application of microlever to micromechanical silicon resonant accelerometers[J]. Editorial Office of Optics and Precision Engineering, 2011,19(4): 805-811
石然, 姜劭栋, 裘安萍, 苏岩. 微杠杆在硅微谐振式加速度计中的应用[J]. 光学精密工程, 2011,19(4): 805-811 DOI： 10.3788/OPE.20111904.0805.

SHI Ran, JIANG Shao-dong, QIU An-ping, SU Yan. Application of microlever to micromechanical silicon resonant accelerometers[J]. Editorial Office of Optics and Precision Engineering, 2011,19(4): 805-811 DOI： 10.3788/OPE.20111904.0805.

摘要

从基于DDSOG(Deep Dry Silicon on Glass)工艺的硅微谐振式加速度计样机入手

阐述了加速度计中微杠杆结构对惯性力的放大作用

证明了标度因数与系统放大倍数

为正比关系

并以加速度计样机中的单级微杠杆为例

建立了加速度计的理论模型。推导了微杠杆的放大倍数A和轴向刚度K的计算公式

以此为基础导出了加速度计系统放大倍数n的计算方法。依据公式计算得到加速度计样机的系统放大倍数n的理论值为21.820

并用有限元方法对理论值进行了仿真验算

得出

的仿真值为19。最后对加速度样机进行了实际测试

测得加速度计的标度因数为127.33 Hz/

系统放大倍数

为25.466。对所得结果的比较表明

系统放大倍数的理论值与仿真值及实验值的误差分别为14.8%和14.3%

误差在可接受范围内。

Abstract

A micromechanical Silicon Resonant Accelerometer (SRA) prototype fabricated by Deep Dry Silicon on Glass (DDSOG) process was presented. The amplification of single-stage microlever in the SRA to the interial force was researched

then it pointed out that the scale factor of SRA is proportional to the system amplification factor

.The theoretical model of single-stage microlever in SRA was established

and the formulas for microlever amplification factor

and axial stiffness

were derived. On this base

the formula for system amplification factor

was also derived. According to the formula

the theoretical value of system amplification factor

for SRA prototype is calculated to be 21.820. As a comparison

its simulation value of 19 is also achieved by the Finite Element Analysis (FEA). The practical test for the SRA prototype was performed

which shows that the scale factor of the SRA is 143 Hz/

and the system amplification factor is 25.466. As compared with the theoretical value

the errors of simulation and test results are 14.8% and 14.3%

respectively

which are within the accepta- ble range.

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Keywords

references

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