Fiber optic accelerometer based on fiber-mirror interference cavity

LIN Qiao; CHEN Liu-hua; LI Shu; WU Xing-kun

doi:10.3788/OPE.20111906.1179

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Fiber optic accelerometer based on fiber-mirror interference cavity

Article | 更新时间：2020-08-12

- Fiber optic accelerometer based on fiber-mirror interference cavity
- Optics and Precision Engineering Vol. 19, Issue 6, Pages: 1179-1184(2011)
- 作者机构：
  
  浙江大学现代光学仪器国家重点实验室,浙江杭州,310027
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20111906.1179
  CLC： TN253
- Received：04 August 2010，
  
  Revised：27 October 2010，
  
  Published Online：25 June 2011，
  
  Published：25 June 2011
- 稿件说明：
移动端阅览
林巧, 陈柳华, 李书, 吴兴坤. 基于光纤-镜面干涉腔的光纤加速度计[J]. 光学精密工程, 2011,19(6): 1179-1184

LIN Qiao, CHEN Liu-hua, LI Shu, WU Xing-kun. Fiber optic accelerometer based on fiber-mirror interference cavity[J]. Editorial Office of Optics and Precision Engineering, 2011,19(6): 1179-1184
林巧, 陈柳华, 李书, 吴兴坤. 基于光纤-镜面干涉腔的光纤加速度计[J]. 光学精密工程, 2011,19(6): 1179-1184 DOI： 10.3788/OPE.20111906.1179.

LIN Qiao, CHEN Liu-hua, LI Shu, WU Xing-kun. Fiber optic accelerometer based on fiber-mirror interference cavity[J]. Editorial Office of Optics and Precision Engineering, 2011,19(6): 1179-1184 DOI： 10.3788/OPE.20111906.1179.

摘要

设计、研制了一种基于光纤-镜面干涉腔的光纤加速度计。介绍了该加速度计的传感原理及弹性结构设计

并对其性能进行了实验测试。该加速度计用固定于圆网状弹性结构上的硅微反射镜与处理过的光纤端面构成光纤-镜面干涉腔来产生相位差随外界加速度改变的光干涉信号;采用相位生成载波技术通过对干涉信号的调制和解调实现对相位差的精确测定。应用工程软件Cosmosworks (Solidworks) 对该加速度计弹性结构的灵敏度进行了理论分析

并与样机测试比较。结果表明

该光纤加速度计的灵敏度为63.2 rad/

共振频率为160 Hz

分辨率为4

而动态范围接近10

结果与理论分析符合得较好。该加速度计不仅结构简单

还集成了多维加速度计的优势。

Abstract

An optical fiber accelerometer was designed based on a fiber-mirror interference cavity. The sensing principle and elastic structure of the accelerometer were introduced and its performance was measured.A silicon micro-mirror mounted on a mesh spring elastic structure and a fiber facet were used to form a fiber-mirror cavity to generate optical interference signals as a function of acceleration.A Phase Generated Carrier(PGC) technology was adopted to modulate the interference signals to obtain phase difference signals with high resolution.Finally

the strain analysis of elastic structure was performed by Cosmosworks (Solidworks) to calculate the sensitivity.The performance measurement of prototype shows that the accelerometer can offer a sensitivity of 63.2 rad/

in the resonance frequency of 160 Hz and a resolution of 4

with a dynamic range near 10

.Furthermore

the accelerometer is structure simple and easy to be intergrated and multi-dimensioned.

关键词

Keywords

references

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