High-precision metrology for optical components with large-apertures and large radii of curvature

YANG Li-ming; YE Hai-xian

doi:10.3788/OPE.20111906.1207

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High-precision metrology for optical components with large-apertures and large radii of curvature

Article | 更新时间：2020-08-12

- High-precision metrology for optical components with large-apertures and large radii of curvature
- Optics and Precision Engineering Vol. 19, Issue 6, Pages: 1207-1212(2011)
- 作者机构：
  
  成都精密光学工程研究中心,四川成都,610041
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20111906.1207
  CLC： TH74
- Received：13 September 2010，
  
  Revised：27 October 2010，
  
  Published Online：25 June 2011，
  
  Published：25 June 2011
- 稿件说明：
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杨李茗, 叶海仙. 大口径大曲率半径光学元件的高精度检测[J]. 光学精密工程, 2011,19(6): 1207-1212

YANG Li-ming, YE Hai-xian. High-precision metrology for optical components with large-apertures and large radii of curvature[J]. Editorial Office of Optics and Precision Engineering, 2011,19(6): 1207-1212
杨李茗, 叶海仙. 大口径大曲率半径光学元件的高精度检测[J]. 光学精密工程, 2011,19(6): 1207-1212 DOI： 10.3788/OPE.20111906.1207.

YANG Li-ming, YE Hai-xian. High-precision metrology for optical components with large-apertures and large radii of curvature[J]. Editorial Office of Optics and Precision Engineering, 2011,19(6): 1207-1212 DOI： 10.3788/OPE.20111906.1207.

摘要

针对目前已有的光学检测设备无法实现大口径大曲率半径光学元件高精度检测的问题

提出利用长程轮廓仪(LTP)来进行大口径大曲率半径(正、负)光学元件的精确测量

并通过实验证明了LTP检测大曲率半径光学元件的优势。分析计算了LTP测量曲率半径的算法精度

设计了合理的机械结构进行旋转测量

得到了全口径的曲率半径分布。最后与球径仪、刀口仪的测量结果进行了对比。对

=37.108 m和

=41.065 m的球面镜测量结果显示

LTP的测量重复性在0.05%以内

与球径仪、刀口仪的测量值相差均在0.05%以内。研究结果表明

LTP可以用来解决目前几十米的大

曲率半径光学元件难以高精度测量的难题。

Abstract

For lack of proper metrologic instruments to measure optical components with large-apertures and large radii of curvature

this paper investigates the feasibility to measure large radius of curvature (positive

negative) by using a Long Trace Profiler(LTP). The experiments are carried out to verify its advantages. The algorithmic precision of radius of curvature tested with the LTP is calculated

then the radius of curvature of full-aperture is figured out by a rotational measurement in a proper mechanical stage.Finally

obtained tested results are compared with those of a spherometer and a knife-edge tester. For the spherical surface with

=37.108 m and

=41.065 m

the repeatability of the LTP is in 0.05%

which means the relative discrepancy between the LTP and the spherometer or the knife-edge tester is under 0.05%. These results indicate that LTP is capable of measuring components with large radii of curvature in high-precision.

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references

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