Design of flexible-supporting mechanism with double compensation rods for moving mirror

LIU Hua; LIU Wei-qi; FENG Rui; WEI Zhong-lun; ZHANG Jian

doi:10.3788/OPE.20111906.1313

您当前的位置：

首页 >

文章列表页 >

Design of flexible-supporting mechanism with double compensation rods for moving mirror

Article | 更新时间：2020-08-12

- Design of flexible-supporting mechanism with double compensation rods for moving mirror
- Optics and Precision Engineering Vol. 19, Issue 6, Pages: 1313-1319(2011)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20111906.1313
  CLC： TH703;TH744.1
- Received：14 October 2010，
  
  Revised：17 November 2010，
  
  Published Online：25 June 2011，
  
  Published：25 June 2011
- 稿件说明：
移动端阅览
柳华, 刘伟奇, 冯睿, 魏忠伦, 张健. 柔性双补偿杆式动镜支撑机构的设计[J]. 光学精密工程, 2011,19(6): 1313-1319

LIU Hua, LIU Wei-qi, FENG Rui, WEI Zhong-lun, ZHANG Jian. Design of flexible-supporting mechanism with double compensation rods for moving mirror[J]. Editorial Office of Optics and Precision Engineering, 2011,19(6): 1313-1319
柳华, 刘伟奇, 冯睿, 魏忠伦, 张健. 柔性双补偿杆式动镜支撑机构的设计[J]. 光学精密工程, 2011,19(6): 1313-1319 DOI： 10.3788/OPE.20111906.1313.

LIU Hua, LIU Wei-qi, FENG Rui, WEI Zhong-lun, ZHANG Jian. Design of flexible-supporting mechanism with double compensation rods for moving mirror[J]. Editorial Office of Optics and Precision Engineering, 2011,19(6): 1313-1319 DOI： 10.3788/OPE.20111906.1313.

摘要

对红外傅里叶变换光谱仪动镜支撑机构的核心部分柔性铰链机构进行了研究。以柔性单补偿杆式机构为基体

设计出一种柔性双补偿杆式机构。利用有限元分析软件Patran和Nastran对其进行了模拟计算

并和目前国内最好的柔性单补偿杆式机构进行比较。然后

根据模拟计算得出的结构参数加工出简易实物

并对实物进行了实验测试及误差分析。结果表明

在模拟计算中

柔性双补偿杆式机构使动镜的垂直耦合位移缩小为柔性单补偿杆式机构的6.8%;误差分析认为柔节的长度公差是引起动镜垂直耦合位移的一个重要因素。因此

若要提高动镜支撑机构的精度

加工时必须严格控制与柔节相关的尺寸公差。

Abstract

A flexible mechanism which was considered as a key component of the moving mirror supporting in a Michelson interferometer based Fourier-transform spectrometer was researched.The flexible mechannism with double compensation rods was created on the basis of the flexible mechannism with a single compensation rod. By use of the finite element analysis softwares PATRAN and NASTRAN

the mechanism was simulated and the corresponding results were compared with the best theoretical calculation of the flexible mechannism with the single compensation rod. A simplified model was also fabricated according to the structral specifications from simulation calculation. Furthermore

the model was also tested and error analysis was conducted. It is shown that the vertical coupling displacement of the moving mirror introduced by this flexible mechannism with double compensation rods has been decreased by 93.2%. The results of error analysis indicate that the length tolerence of the flexible segment is a critical factor that would result in coupling displacement of the moving mirror. Therefore

it points out that when a supporting mechanism with high precision is machined for the moving mirror

the tolerences related to the flexible segments must be strictly controlled in fabrication.

关键词

Keywords

references

于靖军,裴旭,毕树生,等. 柔性铰链机构设计方法的研究进展[J]. 机械工程学报,2010,46(13):2-9. YU J J,PEI X,BI S S,et al..State-of-arts of design method for flexure mechanisms[J].Journal of Mechanical Engineering, 2010,46(13):2-9.(in Chinese)[2] LOBONTIU N,PAINEJSN.Corner filleted flexible hinges ASME[J]. Mech Design,2001,123(3):346-352.[3] LOBONTIU N.Compliant Mechanisms-Design of Flexible Hinges[M].CRC Press,2002.[4] 林雪松,王淑容,李福田. 空间傅立叶变换红外光谱仪用全柔性机构的设计及研究[J]. 光学精密工程,2005,13(6):691-696. LIN X S,WANG S R,LI F T.Design and investigation of the precision scans structure of space infrared FTS[J].Opt. Precision Eng.,2005,13(6):691-696.(in Chinese)[5] 夏尊凤,许焰. 柔性构件和柔性机构自由度分析[J]. 机械设计,2009,26(4):51-53. XIA Z F,XU Y.Analysis on degree of freedom of flexible components and flexible mechanisms[J].Journal of Machine Design, 2009,26(4):51-53. (in Chinese)[6] 陈贵敏,李端玲. 平面柔顺机构的自由度[J]. 机械工程学报,2010,46(13):48-52. CHEN G M,LI D L.Degree of freedom of planar compliant mechanisms[J].Journal of Mechanical Engineering, 2010,46(13):48-52.(in Chinese)[7] 于靖军,宗光华,毕树生. 全柔性机构与MEMS[J]. 光学精密工程,2001,9(1):1-5. YU J J,ZONG G H,BI SH S. Fully compliant mechanisms and MEMS[J]. Opt. Precision Eng.,2001,9(1):1-5.(in Chinese)[8] 张兴勇,苑伟政,熊本炎. 一种新的基于柔性悬臂梁的柔性机构设计方法[J]. 航空精密制造技术,2005(10):630-635. ZHANG X Y,YUAN W Z,XIONG B Y. A new flexible mechanism design method based on fexible cantilever beam[J]. Aviation Precision Manufacturing Technology,2005(10):630-635.(in Chinese)[9] 李媛,张卫民,张之敬,等. 三种常见典型柔性铰链的非线性分析[J]. 制造业信息化.2007(5):23-26. LI Y,ZHANG W M,ZHANG ZH J, et al.. Nonlinearity analysis of three typical flexure hinges [J].Manufacturing Informationalization,2007(5):23-26.(in Chinese)[10] 辛洪兵,郑伟智,赵罘. 弹性铰链研究[J]. 光学精密工程,2003,11(1):89-91. XIN H B,ZHENG W ZH,ZHAO F.Research on flexible hinges[J].Opt. Precision Eng.,2003,11(1):89-91.(in Chinese)[11] 杨雪锋,李威,王禹桥,等. 直角柔性铰链单平行四杆机构输出位移分析[J]. 纳米技术与精密工程,2009,7(4):346-349. YANG X F,LI W,WANG Y Q,et al..Output displacement analysis of single parallel four-bar mechanism with right angle flexure hinge[J].Nanotechnology and Precision Engineering,2009,7(4):346-349.(in Chinese)[12] 张志杰, 袁怡宝. 典型柔性铰链柔度性能的计算与分析[J]. 工程力学,2008,25(4):106-110. ZHANG Z J,YUAN Y B. Compliance calculation and analysis of typical flexure hinges[J].Engineering Mechanics, 2008,25(4):106-110.(in Chinese)[13] 刘庆玲,翁海珊,邱丽芳. 新型单边复和型柔性铰链的柔度计算及其性能分析[J]. 工程设计学报,2009,16(4):276-280. LIU Q L,WENG H S,QIU L F.Compliances calculation and performance analysis of half hybrid flexure hinge[J].Journal of Engineering Design,2009,16(4):276-280.(in Chinese)[14] 张景柱,徐诚,赵彦峻. 新型柔性铰链的柔度计算[J]. 工程力学,2008,25(11):27-31. ZHANG J ZH,XU C,ZHAO Y J.Compliance calculation of a novel flexure hinge[J].Engineering Mechanics,2008,25(11):27-31. (in Chinese)

Views

388

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Near-infrared ultra-wideband wavelength measurement for fiber laser

Design and testing of harmonic reducer integrated with torque sensor

Vertical clamping deformation analysis and validation of 300 mm wafer warpage detection

Integrated platform for micro-vibration simulation and active-passive vibration isolation

Design and parameter optimization of frictionless cylinder based on aerostatic bearing

Related Author

YU Chenhao

YAN Fengping

YANG Dandan

WANG Pengfei

TAN Zhongwei

REN Wenhua

FENG Ting

LI Ting

Related Institution

School of Physical Sciences and Engineering， Beijing Jiaotong University

School of Electronic and Information Engineering， Beijing Jiaotong University

Hebei Key Laboratory of Micro-Nano Precision Optical Sensing and Measurement Technology， Northeastern University at Qinhuangdao

School of Mechanical Engineering， Dalian University of Technology

School of Optoelectronics，University of Chinese Academy of Sciences

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰