Filtering method of improving quality of grating Moir&eacute; fringe

WU Hong-sheng; ZENG Qi-feng; QIAO Dong; GUO Bang-hui

doi:10.3788/OPE.20111908.1944

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Filtering method of improving quality of grating Moiré fringe

Article | 更新时间：2020-08-12

- Filtering method of improving quality of grating Moiré fringe
- Optics and Precision Engineering Vol. 19, Issue 8, Pages: 1944-1949(2011)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20111908.1944
  CLC： O436.1
- Received：06 December 2010，
  
  Revised：15 January 2011，
  
  Published Online：25 August 2011，
  
  Published：25 August 2011
- 稿件说明：
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吴宏圣, 曾琪峰, 乔栋, 郭帮辉. 提高光栅莫尔条纹信号质量的滤波方法[J]. 光学精密工程, 2011,19(8): 1944-1949

WU Hong-sheng, ZENG Qi-feng, QIAO Dong, GUO Bang-hui. Filtering method of improving quality of grating Moiré fringe[J]. Editorial Office of Optics and Precision Engineering, 2011,19(8): 1944-1949
吴宏圣, 曾琪峰, 乔栋, 郭帮辉. 提高光栅莫尔条纹信号质量的滤波方法[J]. 光学精密工程, 2011,19(8): 1944-1949 DOI： 10.3788/OPE.20111908.1944.

WU Hong-sheng, ZENG Qi-feng, QIAO Dong, GUO Bang-hui. Filtering method of improving quality of grating Moiré fringe[J]. Editorial Office of Optics and Precision Engineering, 2011,19(8): 1944-1949 DOI： 10.3788/OPE.20111908.1944.

摘要

针对莫尔条纹信号的质量问题提出一种相位差滤波法。将指示光栅上四场裂相方式中每场细分为多个不同相位的行组合

利用行组合间的不同相位排列关系来消弱高次谐波的分量

从而提高莫尔条纹信号的质量。首先

介绍了莫尔条纹的傅里叶级数表达式

对莫尔条纹的各次谐波特性进行了分析。然后

以指示光栅的图案设计为例

阐明该滤波方法消除二次、三次和四次谐波的过程。最后

通过仿真和实验

验证了该滤波方法对削弱高次谐波的有效性。实验结果表明

该滤波方法可将莫尔条纹信号的三次谐波削弱4.9%

在20 m内测量精度提高了0.5 m。另外

该方法仅改变指示光栅的刻划图案

不增加制造成本和体积

实用性强

易于工业生产。

Abstract

A filtering method

phase-difference filtering

was presented to improve the quality of grating Moir fringe.Each field of the 4 field scanning reticle was devided into multi-lines with different phases to suppress the high harmonic generations and to improve the signal quality of the Moire fringe. Firstly

the Fourier series expression of Moir fringe was introduced and various harmonic generations of the Moir fringe were analyzed. Then

the filtering method to eliminate the second

third and fourth harmonic generations was illustrated with the designed grating patterns. Finally

the validity of the method to inhibit the high harmonic generations was verified through simulations and experiments. Experimental results indicate that the third harmonic generation of the Moir fringe signal can be reduced by 4.9% and the accuracy can be improved by 0.5 m with the period of 20 m. The method is effective

low cost

without increasing the system size and easy to be used in industrial productions.

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Keywords

references

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Filtering method of improving quality of grating Moiré fringe

DOI：10.3788/OPE.20111908.1944

摘要

Abstract

关键词

Keywords

references