Development of decoupled z-axis micromachined gyroscope

ZHOU Hao; SU Wei; LIU Xian-xue; TANG Hai-lin

doi:10.3788/OPE.20111909.2123

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Development of decoupled z-axis micromachined gyroscope

Article | 更新时间：2020-08-12

- Development of decoupled z-axis micromachined gyroscope
- Optics and Precision Engineering Vol. 19, Issue 9, Pages: 2123-2130(2011)
- 作者机构：
  
  1. 中国工程物理研究院电子工程研究所,四川绵阳,621900
  2. 中国工程物理研究院北京研究生部北京,100088
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20111909.2123
  CLC： TP212.1
- Received：27 October 2010，
  
  Revised：25 January 2011，
  
  Published Online：26 September 2011，
  
  Published：26 September 2011
- 稿件说明：
移动端阅览
周浩, 苏伟, 刘显学, 唐海林. 解耦z轴微机械陀螺的研制[J]. 光学精密工程, 2011,19(9): 2123-2130

ZHOU Hao, SU Wei, LIU Xian-xue, TANG Hai-lin. Development of decoupled z-axis micromachined gyroscope[J]. Editorial Office of Optics and Precision Engineering, 2011,19(9): 2123-2130
周浩, 苏伟, 刘显学, 唐海林. 解耦z轴微机械陀螺的研制[J]. 光学精密工程, 2011,19(9): 2123-2130 DOI： 10.3788/OPE.20111909.2123.

ZHOU Hao, SU Wei, LIU Xian-xue, TANG Hai-lin. Development of decoupled z-axis micromachined gyroscope[J]. Editorial Office of Optics and Precision Engineering, 2011,19(9): 2123-2130 DOI： 10.3788/OPE.20111909.2123.

摘要

提出了一种检测模态解耦的

轴微机械陀螺

其检测模态被约束为1自由度振动

可抑制驱动模态的影响

降低不期望的检测模态偏置

并使用双质量结构在降低模态耦合的同时获得了较好的模态频率匹配。为满足驱动和检测模态自由度约束要求

使用了U形支撑梁。采用反应离子深刻蚀工艺制作了高深宽比结构层

获得了较大的验证质量

抑制了器件的机械热噪声

提高了陀螺分辨率。加工的陀螺面积为2 100 m2 100 m

厚度为60 m。采用真空封装

获得了较高的机械品质因子。测试结果表明

驱动和检测模态的品质因子分别为2 000和1 800

机械热噪声为3.76()/hHz。在200 ()/s的量程内

刻度因子为21 mV/()s

-1

非线性度为1.426 %FS

1 h内测得零偏稳定性为0.057 9()/s。

Abstract

A decoupled-sense-mode

-axis micromachined gyroscope is presented. The sense mode is restricted to be only one degree of freedom for vibration

which restrains the effect from the drive mode and reduces the undesired sense mode bias. Using double masses allows both matched natural frequencies and decoupled modes. A U-shaped beam is utilized for meeting the requirements on the degrees-of-freedom of the drive and sense modes. In order to create a high-aspect ratio structure

a Deep Reactive Ion Etching (DRIE) process is used to achieve a larger proof mass

reduce the thermomechanical noise floor and provide high sensitivity. The area of the fabricated gyroscope is 2 100 m2 100 m

with a thickness of 60 m. The gyroscope is vacuum-packaged for a high mechanical quality factor. Measured results show that the drive and sense mode quality factors are 2 000 and 1 800

respectively

and the thermomechanical noise floor is 3.76 ( )/hHz

. The scale factor is 21 mV/()s

-1

in a range of 200 ()/s

with a full-scale nonlinearity of 1.426 %FS. The bias drift is 0.057 9 ()/s over a 1 h measurement period.

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references

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