Calibration of measuring error caused by interferometric imaging distortion

LIU Man-lin; YANG Wang; XUE Wei-cai

doi:10.3788/OPE.20111910.2349

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Calibration of measuring error caused by interferometric imaging distortion

Article | 更新时间：2020-08-12

- Calibration of measuring error caused by interferometric imaging distortion
- Optics and Precision Engineering Vol. 19, Issue 10, Pages: 2349-2354(2011)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春,130033
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20111910.2349
  CLC： TH744.3
- Received：27 October 2010，
  
  Revised：22 February 2011，
  
  Published Online：27 October 2011，
  
  Published：25 October 2011
- 稿件说明：
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刘满林, 杨旺, 许伟才. 干涉仪成像畸变引起测量误差的校正方法[J]. 光学精密工程, 2011,19(10): 2349-2354

LIU Man-lin, YANG Wang, XUE Wei-cai. Calibration of measuring error caused by interferometric imaging distortion[J]. Editorial Office of Optics and Precision Engineering, 2011,19(10): 2349-2354
刘满林, 杨旺, 许伟才. 干涉仪成像畸变引起测量误差的校正方法[J]. 光学精密工程, 2011,19(10): 2349-2354 DOI： 10.3788/OPE.20111910.2349.

LIU Man-lin, YANG Wang, XUE Wei-cai. Calibration of measuring error caused by interferometric imaging distortion[J]. Editorial Office of Optics and Precision Engineering, 2011,19(10): 2349-2354 DOI： 10.3788/OPE.20111910.2349.

摘要

根据光学系统的波像差理论和干涉检测原理

分析了干涉仪系统的成像畸变对测量结果的影响

提出了对干涉仪系统的成像畸变进行标定和校正的方法。重点讨论了被测面的摆放存在倾斜和离焦两种情况下产生的测量误差

并提出了误差校正方法。实验中对同一个被测面进行多次测量

结果显示

干涉图样为3个条纹时的面形测量结果为30.96 nm PV

6.32 nm RMS

10个条纹时的面形测量结果为41.25 nm PV

8.22 nm RMS。校正后两次测量的PV值差降低到1.42 nm

RMS值差为0.4 nm。实验结果表明:提出的畸变校正方法可以有效地降低测量误差

提高测量结果的复现性

为高精度面形测量提供参考。

Abstract

Based on the wavefront aberration theory and interferometric theory

the influences of imaging distortion in an interferometer on measuring results are analyzed and calibration and correction methods for the imaging distortion are proposed. The measurement errors caused by misalignments of the test surface (tip/tilt and disfocus) are discussed mainly. An experiment is carried out to measure the same surface under different number of fringes. The test results show that the surface shapes are 30.96 nm PV and 6.32 nm RMS for 3 fringes

and 41.25 nm PV and 8.22 nm RMS for 10 fringes

respectively. After the calibration

the difference of the results are declined to 1.42 nm PV and 0.4 nm RMS. The experiment proves that the calibration solution referred in this paper can improve the measurement accuracy.

关键词

Keywords

references

SCHREINER R, SCHWIDER J, LINDLEIN N, et al.. TAbsolute testing of the reference surface of a Fizeau interferometer through even/odd elecompositions[J].Applied Optics,2008,47(32):6134-6141[2]TULF GRIESMANN, QUANDOU WANG, JOHANNES SOONS, et al.. A simple ball average for reference sphere calibration[J].SPIE,2005,5869:58690-[3]TBRUCE E TRUAX.Absolute interferometrics testing of spherical surfaces[J].SPIE,1990,1400:61-69[4]PARAMESWARAN HARIHARAN.Interferometric testing of optical surfaces: absolute measurements of flatness[J].Opt. Eng,1997,36(9):2478-2481[5]TKATHERINE CREATH, JAMES C WYANT.Absolute measurement of spherical surface[J].SPIE,1991,1332:2-8[6]XIN JIA, TINGWEN XING, WUMEI LINT, et al.Error analysis of absolute testing based on even-odd functions method[J].SPIE,2010,7638:76383-[7]LARS A SELBERG.Interferometer accuracy and precision[J].SPIE,1990,1400:24-33[8]ROMUALD JOZWICKI.Correction of spherical aberration in a interferometric system with nonzero difference between optical paths and fringeless observation field[J].Applied Optics,1990,29(25):3575-3582[9]JAMES H BURGE.Fizeau interferometry for large convex surfaces[J].SPIE,1995,2536:127-139[10]PING ZHOU, JAMES H BURGE.Limits for interferometer calibration using the random ball test[J].SPIE,2009,7426:7426U1-7426U9.

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