Calculation of resolution for EUV telescope based on surface roughness of mirrors

YANG Lin; ZHENG Xian-liang; CHEN Bo

doi:10.3788/OPE.20111911.2565

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Calculation of resolution for EUV telescope based on surface roughness of mirrors

Article | 更新时间：2020-08-12

- Calculation of resolution for EUV telescope based on surface roughness of mirrors
- Optics and Precision Engineering Vol. 19, Issue 11, Pages: 2565-2572(2011)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20111911.2565
  CLC： TH745;P111.41
- Received：13 September 2010，
  
  Revised：18 November 2010，
  
  Published Online：25 November 2011，
  
  Published：25 November 2011
- 稿件说明：
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杨林, 郑贤良, 陈波. 基于反射镜表面粗糙度计算极紫外望远镜分辨率[J]. 光学精密工程, 2011,19(11): 2565-2572

YANG Lin, ZHENG Xian-liang, CHEN Bo. Calculation of resolution for EUV telescope based on surface roughness of mirrors[J]. Editorial Office of Optics and Precision Engineering, 2011,19(11): 2565-2572
杨林, 郑贤良, 陈波. 基于反射镜表面粗糙度计算极紫外望远镜分辨率[J]. 光学精密工程, 2011,19(11): 2565-2572 DOI： 10.3788/OPE.20111911.2565.

YANG Lin, ZHENG Xian-liang, CHEN Bo. Calculation of resolution for EUV telescope based on surface roughness of mirrors[J]. Editorial Office of Optics and Precision Engineering, 2011,19(11): 2565-2572 DOI： 10.3788/OPE.20111911.2565.

摘要

针对短波段成像系统中的散射问题

提出了一种基于反射镜表面粗糙度来计算极紫外太阳望远镜工作波段分辨率的方法。首先分析了两镜系统中散射光线的传播

讨论了反射镜表面粗糙度相对波长的比值与像面光强分布的关系。分频段测量了反射镜的表面粗糙度

利用

-相关模型拟合出全频段的一维功率谱密度(PSD)。数值计算结果表明:在1/

到1/

(

为入射光波长)的空间频率范围内

主次镜的有效均方根表面粗糙度分别为0.59 nm和0.77 nm。利用Zemax光学设计软件

建立了包含反射镜表面粗糙度测量数据的极紫外(EUV)望远镜非序列模型

该计算模型能够反映出反射镜表面散射对像面分辨率的影响

结果显示

在30.4 nm波段

包含80%的能量半径从3.9 m增大到4.3 m

望远镜在工作波段相应的分辨率为0.25

满足设计要求。

Abstract

According to the surface scattering of a mirror surface at the short wavelength band

a resolution calculation method based on the surface roughness of mirror was presented for an Extreme Ultraviolet(EUV) telescope. First

the propagation of scatter light in two mirror systems was analyzed in details

and the relationship between the distribution of light energy on focal plane and the ratio of mirror surface roughness to wavelength was discussed. The surface roughness of the mirror was measured in different wavelength bands and the one-dimensional Power Spectral Densities(PSDs)on all relative spatial frequency ranges were fitted by a

-relevant model. The numerical results show that the effective RMS surface roughnesses of primary and secondary mirrors are 0.59 nm and 0.77 nm in the spatial frequency from 1 /

(D is the diameter of the mirror)to 1 /

( is an incident wavelength). The optical design software Zemax was used to build a non-sequence model of EUV telescope which contains the information about mirror surface roughness. This model can reveal the behavior of scatter light on the mirror surface and can calculate the resolution of the image plane. The results indicate that the radius of 80% energy changes from 3.9 m to 4.3 m and the corresponding angular resolution of the telescope is 0.25. This method is convenient

effective and suitable for imaging evaluation.

关键词

Keywords

references

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