Fabrication of silicon carbide lightweight mirror blank

ZHAO Wen-xing; ZHANG Ge; ZHAO Ru-cheng; BAO Jian-xun

doi:10.3788/OPE.20111911.2609

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Fabrication of silicon carbide lightweight mirror blank

Article | 更新时间：2020-08-12

- Fabrication of silicon carbide lightweight mirror blank
- Optics and Precision Engineering Vol. 19, Issue 11, Pages: 2609-2617(2011)
- 作者机构：
  
  中国科学院长春光机学精密机械与物理研究所中国科学院光学系统先进制造技术重点实验室,吉林长春,130033
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20111911.2609
  CLC： TH703
- Received：10 March 2011，
  
  Revised：17 May 2011，
  
  Published Online：25 November 2011，
  
  Published：25 November 2011
- 稿件说明：
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赵文兴, 张舸, 赵汝成, 包建勋. 轻型碳化硅质反射镜坯体的制造工艺[J]. 光学精密工程, 2011,19(11): 2609-2617

ZHAO Wen-xing, ZHANG Ge, ZHAO Ru-cheng, BAO Jian-xun. Fabrication of silicon carbide lightweight mirror blank[J]. Editorial Office of Optics and Precision Engineering, 2011,19(11): 2609-2617
赵文兴, 张舸, 赵汝成, 包建勋. 轻型碳化硅质反射镜坯体的制造工艺[J]. 光学精密工程, 2011,19(11): 2609-2617 DOI： 10.3788/OPE.20111911.2609.

ZHAO Wen-xing, ZHANG Ge, ZHAO Ru-cheng, BAO Jian-xun. Fabrication of silicon carbide lightweight mirror blank[J]. Editorial Office of Optics and Precision Engineering, 2011,19(11): 2609-2617 DOI： 10.3788/OPE.20111911.2609.

摘要

研究了轻型碳化硅质反射镜坯体制造技术

讨论了制备工艺中的关键环节。提出了一种先进的消失模技术用于制备性能更加优异的背部半封闭式轻量化结构。针对制备大尺寸复杂形状陶瓷的难点

研究了SiC陶瓷素坯凝胶注模成型及成型过程中高固相含量低黏度SiC浆料的配置、浆料固化时间控制及大尺寸复杂形状SiC湿坯的液体干燥工艺等。测试分析了坯体烧结过程中素坯的热失重与差热曲线

制定了最佳的烧结工艺。通过对以上关键技术的研究

制备得到了不同形状与轻量化结构形式的单块轻型SiC坯体

最大尺寸为1 100 mm820 mm。

Abstract

Fabrication techniques of lightweight silicon carbide (SiC) mirror blank were researched and the key problems in the fabricating process were discussed. An advanced lost mould method was proposed to fabricate the excellent lightweight structure with a partly open-back. In consideration of the difficulty on fabricating SiC ceramics with larger sizes and complex shapes

the gelcasting for a SiC green body was studied and the ingredient of the SiC slurry with high solid phase and low viscosity

control of slurry time and the drying processing for the wed bland in the gelcasting were discussed. Thermogravimetic and Differential Thermal Analysis TG/DTA curves for the green body were analyzed

then the best sintering process was established. By the proposed technologies

RB-SiC mirror blanks with different shapes and lightweight constructions were prepared and the largest one is 1 100 mm820 mm.

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Keywords

references

EALEY M A, WEAVER G Q. Development history and trends for reaction bonded silicon carbide mirrors[J].SPIE,1996,2856:66-72.[2] 马文礼,沈忙作. 碳化硅轻型反射镜技术[J]. 光学精密工程,1999,7(2):8-12. MA W R,SHEN M ZH. Weightlight SiC mirror technology[J].Opt. Precision Eng., 1999,7(2):8-12.(in Chinese)[3] 郝寅雷,赵文兴. 新型反射镜材料碳化硅[J]. 宇航材料工艺,2001(4):11-14. HAO Y L,ZHAO W X. New mirror material of silicon carbide[J].Aerospace Materials &Teeh-Rnology,2001(4):11-14.(in Chinese)[4] JANNEY M A,NUNN S D, WALLS C A. Gelcasting .The Handbook of Ceramic Engineering[M]. New York:Marcel Dekker.lnc,1998.[5] 王刚,阎逢元,石雷,等. 精密陶瓷凝胶注模成型工艺评述[J]. 材料科学与工程,2003,4:602-606. WANG G, YAN F Y, SHI L, et al.. Review of gelcasting technology for fine ceramics[J]. Materials Science and Engineering,2003,4:602-606.(in Chinese)[6] 张舸,赵汝成,赵文兴. 大尺寸轻型碳化硅质反射镜素坯的凝胶注模成型[J]. 稀有金属材料与工程,2008,37(增1):678-681. ZHANG G, ZHAO R CH, ZHAO W X. Gel-casting of large-scale lightweight SiC mirror blank[J]. Rare Metal Materials and Engineering, 2008,37(Suppl.1):678-681.(in Chinese)[7] 周龙捷,许兴利,黄勇,等. 水基高固相含量SiC悬浮体的指标和凝胶注模成型[J]. 高技术通讯,2000,7:100-103. ZHOU L J, XU X L, HUANG Y, et al.. Preparing and gelcasting of high concentrated aqueous silicon carbide suspension[J]. High Technology Letters, 2000,7:100-103.(in Chinese)[8] 周龙捷,许兴利,谢志鹏,等. 含硅材料凝胶注模成型中的放气反应堆生坯显微结构的影响[J]. 材料工程,2000,7:30-33. ZHOU L J, XU X L, XIE ZH P, et al.. Gas-discharging reaction in gelcasting of Si-containing materials and their effect on microstructure of green bodies[J]. Journal of Materials Engineering, 2000,7:30-33.(in Chinese)[9] 张宁,茹红强,才庆魁. SiC粉体制备及陶瓷材料液相烧结[M]. 东北大学出版社,2008:42-49. ZHANG N, RU H Q, CAI Q K. Preparing of SiC Powder and Liquid Sintering of Ceramic Material[M]. Northeastern University Press, 2008:42-49.(in Chinese)

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