Time/pressure pL micro-bonding technology

SHI Ya-li; ZHANG Wen-sheng; XU De; ZHANG Zheng-tao; ZHANG Juan

doi:10.3788/OPE.20111911.2724

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Time/pressure pL micro-bonding technology

Article | 更新时间：2020-08-12

- Time/pressure pL micro-bonding technology
- Optics and Precision Engineering Vol. 19, Issue 11, Pages: 2724-2730(2011)
- 作者机构：
  
  中国科学院自动化研究所精密感知与控制中心北京,100190
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20111911.2724
  CLC： TH16
- Received：04 May 2011，
  
  Revised：25 June 2011，
  
  Published Online：25 November 2011，
  
  Published：25 November 2011
- 稿件说明：
移动端阅览
史亚莉, 张文生, 徐德, 张正涛, 张娟. 时间/压力型pL级微点胶技术[J]. 光学精密工程, 2011,19(11): 2724-2730

SHI Ya-li, ZHANG Wen-sheng, XU De, ZHANG Zheng-tao, ZHANG Juan. Time/pressure pL micro-bonding technology[J]. Editorial Office of Optics and Precision Engineering, 2011,19(11): 2724-2730
史亚莉, 张文生, 徐德, 张正涛, 张娟. 时间/压力型pL级微点胶技术[J]. 光学精密工程, 2011,19(11): 2724-2730 DOI： 10.3788/OPE.20111911.2724.

SHI Ya-li, ZHANG Wen-sheng, XU De, ZHANG Zheng-tao, ZHANG Juan. Time/pressure pL micro-bonding technology[J]. Editorial Office of Optics and Precision Engineering, 2011,19(11): 2724-2730 DOI： 10.3788/OPE.20111911.2724.

摘要

针对惯性约束核聚变实验装配冷冻靶中靶丸与充气管零件时对用胶量的要求(3 pL)

对时间/压力型pL级微点胶技术进行了研究。将细胞实验用的微注射器改造成时间/压力型微量点胶机

并使用针尖最小内径为0.5 m

由石英材料制作的毛细针进行点胶。搭建了一个微点胶实验平台

设计了分辨率为1.57 m的双目显微视觉检测系统

对毛细针尖的位置和胶滴大小进行实时检测

并使用分辨率为3 m的三自由度微运动平台对针尖位置进行控制。介绍了微点胶实验平台的硬件组成、控制系统以及点胶流程

并在该平台上进行了胶量控制、胶滴定位实验和胶斑测量实验

研究了影响胶量控制的主要因素和最小可控胶量等关键微点胶工艺。实验结果表明

在常温下使用黏度为5P的紫外固化环氧胶

该平台可实现的最小点胶量为2 pL

可用于需要pL级点胶的微装配中。

Abstract

To satisfy the requirement of assembling a capsule and a fill tube for the cryogenic targets in ICF experiments for the 3 pL adhesive volume

the time/pressure micro-bonding technology was studied. A microinjector for life science research was changed to a time/pressure pL micro-bonding device

and a capillary needle made of quartz with inside diameter of 0.5 m was used for dispersing. A micro-bonding station was built for experiments. Two microscopes interfaced with CCD and resolution of 1.57 m were designed to detect the position of the capillary tip and the size of the glue drop

and a

XYZ

motion stage was employed to control the position of the capillary tip. The hardware composition

control system

dispensing process of the micro bonding station was introduced

and the dispensing control

adhesive volume detection

and glue drop positioning experiments were performed to research the key dispensing processes

such as the main factors that affects the volume control and the minimum volume that can be controlled. Experimental results indicate that the designed station can control the minimum adhesive drop in 2 pL using UV Epoxy adhesive with viscosity of 5P in the normal temperature environment

which satisfies pL dispensing requirements in the micro assemblies.

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references

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