Compensation of signal for reflective grating engraved on steel ring

GAI Zhu-qiu; CHENG Zhi-feng

doi:10.3788/OPE.20111912.2947

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Compensation of signal for reflective grating engraved on steel ring

Micro/nano technoloy and fine mechanics | 更新时间：2020-08-12

- Compensation of signal for reflective grating engraved on steel ring
- Optics and Precision Engineering Vol. 19, Issue 12, Pages: 2947-2953(2011)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
  2. 中国科学院长春光学精密机械与物理研究所中国科学院航空光学成像与测量重点实验室,吉林长春,130033
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20111912.2947
  CLC： TP212.12;TN762
- Received：14 April 2011，
  
  Revised：19 May 2011，
  
  Published Online：25 December 2011，
  
  Published：25 December 2011
- 稿件说明：
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盖竹秋, 程志峰. 钢圈反射式光栅信号的补偿[J]. 光学精密工程, 2011,19(12): 2947-2953

GAI Zhu-qiu, CHENG Zhi-feng. Compensation of signal for reflective grating engraved on steel ring[J]. Editorial Office of Optics and Precision Engineering, 2011,19(12): 2947-2953
盖竹秋, 程志峰. 钢圈反射式光栅信号的补偿[J]. 光学精密工程, 2011,19(12): 2947-2953 DOI： 10.3788/OPE.20111912.2947.

GAI Zhu-qiu, CHENG Zhi-feng. Compensation of signal for reflective grating engraved on steel ring[J]. Editorial Office of Optics and Precision Engineering, 2011,19(12): 2947-2953 DOI： 10.3788/OPE.20111912.2947.

摘要

为了提高钢圈反射式光栅的测量精度

设计了光栅信号补偿系统

分别对光栅信号的幅值、直流电平和相位进行了补偿

补偿后两路光栅信号的正交性得到了改善。首先

根据钢圈反射式光栅提取信号的方式建立光栅信号电子学处理系统。然后

分别从幅值、直流电平和相位等3方面提出系统的补偿算法。以8 192 lp/mm的钢圈反射式光栅为平台

以实际的精度检测结果为评判依据

对提出的信号补偿系统进行了实验验证。结果表明

补偿后的光栅精度比补偿前提高了2.28

提高幅度达到50%。实验结果验证了光栅信号补偿方案的可行性。

Abstract

In order to improve the measuring accuracy of a steel ring reflective grating

a grating signal compensation system is designed. The system is used to compensate the signal amplitude

DC voltage and the phase of the grating

respectively

for which two grating signals have a better orthogonality. First

according to the sampling method for steel ring reflective grating signals

an electronic processing system is created. And then several compensation algorithms are established aiming at the signal amplitude

DC voltage and the phase.By taking the steel ring reflective grating with 8 192 lp/mm as a platform and the results of testing precision as a basis of adjudication

the proposed signal compensation system is verified. The results show that the precision compensated has been improved by 2.28 with an increasing magnitude of 50%.Obtained results prove that the signal compensation system is feasible.

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references

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