Design and test of force actuator in active optical system

ZHANG Li-min; ZHANG Bin; YANG Fei; MING Ming

doi:10.3788/OPE.20122001.0038

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Design and test of force actuator in active optical system

Article | 更新时间：2020-08-12

- Design and test of force actuator in active optical system
- Optics and Precision Engineering Vol. 20, Issue 1, Pages: 38-44(2012)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20122001.0038
  CLC： TH751
- Received：20 January 2011，
  
  Revised：27 February 2011，
  
  Published Online：25 January 2012，
  
  Published：25 January 2012
- 稿件说明：
移动端阅览
张丽敏, 张斌, 杨飞, 明名. 主动光学系统力促动器的设计和测试[J]. 光学精密工程, 2012,20(1): 38-44

ZHANG Li-min, ZHANG Bin, YANG Fei, MING Ming. Design and test of force actuator in active optical system[J]. Editorial Office of Optics and Precision Engineering, 2012,20(1): 38-44
张丽敏, 张斌, 杨飞, 明名. 主动光学系统力促动器的设计和测试[J]. 光学精密工程, 2012,20(1): 38-44 DOI： 10.3788/OPE.20122001.0038.

ZHANG Li-min, ZHANG Bin, YANG Fei, MING Ming. Design and test of force actuator in active optical system[J]. Editorial Office of Optics and Precision Engineering, 2012,20(1): 38-44 DOI： 10.3788/OPE.20122001.0038.

摘要

设计了一套用于控制薄镜面主镜面形的力促动器

并进行了实验测试。分析了常用的可以实现高精度、高稳定性的力促动器结构形式;结合实际情况和目前薄镜面主动光学实验系统的要求

设计了由步进电机驱动谐波减速器、精密丝杠传动

S型Loadcell反馈输出力变化的力促动器结构。最后

通过开环和闭环实验对结构进行了测试。实验结果表明

该力促动器行程为0~10 mm

输出力为100 ~100 N

精度优于0.05 N

满足大行程、高精度微量输出和高稳定性要求

可以应用于主动光学支撑系统

同时也适用于其他精密调整结构。

Abstract

A set of force actuator was designed and tested for the active support system with a thin primary mirror to control the mirror surface error all the time. Conventional mechanisms for the force actuator with high accuracy and fine stability in engineering applications were studied. Then

based on the requirements of actuality and implementation in the thin primary mirror experiment system

a set of force actuator was designed and calculated in detail. A stepper motor integrated with a harmonic reducer was used to actuate the mechanism and precision screw to transmit

and an S-type Loadcell was taken as the force sensor to realize the feedback of force output. Finally

the mechanism was tested to validate the design feasibility through the opened loop and closed loop controls. Experimental results indicate that travel range of the force actuator is 0-10 mm

force range is 100-100 N and the accuracy is better than 0.05 N

which satisfies the demands of the force actuator for long range

high accuracy

fine output and stability. The actuator can be used in the support system of active optics

and is also a useful mechanism to other fine-tune structures.

关键词

Keywords

references

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