GAO Ren-jing, ZHAO Jian, LI Xue, TANG Zhen-an. Design and analysis of micro-mass sensor based on Ⅰ-shaped cross-section cantilever[J]. Editorial Office of Optics and Precision Engineering, 2012,20(1): 102-108
GAO Ren-jing, ZHAO Jian, LI Xue, TANG Zhen-an. Design and analysis of micro-mass sensor based on Ⅰ-shaped cross-section cantilever[J]. Editorial Office of Optics and Precision Engineering, 2012,20(1): 102-108 DOI: 10.3788/OPE.20122001.0102.
Design and analysis of micro-mass sensor based on Ⅰ-shaped cross-section cantilever
As the sensitivity of a piezoelectric mass sensor directly depends on the structural frequency variation induced by the mass added. This paper proposes a structure designing method for improving the measuring sensitivity of the mass sensor by using a structure which consists of a symmetrical trough (I-shaped cross-section) cantilever and piezoelectric films. Then
we design and fabricate a novel piezoelectric resonance micro-mass sensor. Considering the influences of the section shape
natural frequency and the vibration mode on the sensitivity
an analytical model is established for analyzing the frequency variation caused by the micro particles. With the same geometric parameters
the simulation and experiments are performed for the sensors with the I-shaped cross-section cantilever and the rectangular section cantilever. It shows that the first order natural frequency of the I-shape cross-section cantilever is 1 851 Hz
and that of the rectangular section cantilever is 1 610 Hz. Moreover
corresponding sensor sensitivities are 3.1210
4
and 1.510
4
Hz/g
respectively
and the former is twice of the latter. The method is feasible and effective for improving the measuring precision of mass sensors.
关键词
Keywords
references
WARD M D, BUTTRY D A. In situ interfacial mass detection with piezoelectric transducers [J]. Science, 1990, 249: 1000-1007.[2] BURG T P, GODIN M, KNUDSEN S M, et al.. Weighing of biomeolecules, single cells and single nanoparitcles in fluid [J]. Nature, 2007, 446(2): 1066-1069.[3] SAKTI S P, ROSLER S, LUCKLUM R, et al.. Thick polystyrene-coated quartz crystal microbalance as a basis of a cost effective immunosensor [J]. Sens. Actuators A, 1999, 76(1-3): 98-102.[4] LIN Z, YIP C M, JOSHEPH I S, et al.. Operation of an ultrasensitive 30 MHz quartz crystal microbalance in liquids [J]. Anal. Chem. ,1993, 65(11): 1546-1551.[5] VERISSIMO M I S, MANTAS P Q, SENOS A M R, et al.. Suitability of PZT ceramics for mass sensors versus widespread used quartz crystals [J]. Sensors and Actuators B, 2003, 95(1-3): 25-31.[6] SHIH W Y, LI X, GU H, et al.. Simultaneous liquid viscosity and density determination using piezoelectric unimorph cantilevers[J]. J. Appl. Phys., 2001, 89(2): 1497-1505.[7] LI X, SHIH W Y, AKSAY I A, et al.. Electromechanical behavior of PZT-brass unimorphs [J]. J. Am. Ceram. Soc., 1999, 82(7):1733-1740.[8] YI J W, SHIH W Y, SHIH W H. Effect of lengt h, width, and mode on the mass detection sensitivity of piezoelectric unimorph cantilevers [J]. J. Appl. Phys., 2002, 91(3):1680-1686.[9] SHIH W Y, LI X, GU H, et al.. Simultaneous liquid viscosity and density determination with piezoelectric unimorph cantilevers[J]. J. Appl. Phys., 2001, 89(2): 1497-1505.[10] SHEN Z, SHIH W Y, SHIH W H. Flexural vibrations and resonance of piezoelectric cantilevers with a nonpiezoelectric extension [J]. IEEE Trans. Ultrason. Ferro. Freq. Control, 2007, 54(10):2001-2010.[11] SHEN Z, SHIH W Y, SHIH W H. Mass detection sensitivity of piezoelectric cantilevers with a nonpiezoelectric extension [J]. Rev. Sci. Instrum. ,2006, 77(6): 065101.[12] LEE J H, HWANGA K S, PARK J, et al.. Immunoassay of prostate-specific antigen (PSA) using resonant frequency shift of piezoelectric nanomechanical microcantilever [J]. Biosens. Bioelectron, 2005, 20(10): 2157-2162.[13] LEE J H, KIM T S, YOON K H. Effect of mass and stress on resonant frequency shift of functionalized Pb Zr0.52Ti0.48O3 thin film microcantilever for the detection of Creactive protein [J]. Appl. Phys. Lett., 2004, 84(16): 3187-3189.[14] YI J W, SHIH W Y, MUTHARASAN R, et al.. In situ cell detection using piezoelectric lead zirconate titanate-stainless steel cantilevers[J]. J. Appl. Phys., 2003, 93(1): 619-625.[15] KUMAR V, BOLEY J W, EKOWALUYO H, et al.. Linear and nonlinear mass sensing using piezoelectrically-actuated microcantilevers . Proceedings of the SEM Annual Conference Indianapolis, Indiana, USA, June 7-10, 2010.[16] ADANYI N, VARADI M, KIM N, et al.. Development of new immunosensors for determination of contaminants in food[J]. Current Applied Physics, 2006, 6(2):279-286.[17] LI P, LI X. A single-sided micromachined piezoresistive SiO2 cantilever sensor for ultra-sensitive detection of gaseous chemicals [J]. Journal of Micromechanical and Microengineering, 2006, 16(12):2539-2546.[18] YANG J L, ONO T. Mechanical behavior of ultrathin micro-cantilever[J]. Sensors and Actuators, 2000,82(1):102-107.[19] LIU M W, WANG J, WANG L D, et al.. Deposition and characterization of Pb(Zr, Ti)O3 sol-gel thin films for piezoelectric cantilever beams [J]. Smart Mater. Struct., 2007,16(1):93-99.[20] EKINCI K L, HUANG X M, ROUKES M L. Ultrasensitive nanoelectromechanical mass detection [J]. Applied Physics Letters, 2004, 84(22):4469-4471.[21] 陈令新,关亚风,杨丙成,等. 压电晶体传感器的研究进展 [J]. 化学进展. 2002, 14(1):68-76. CHEN L X, GUAN Y F, YANG B CH, et al.. Progress in piezoelectric quartz crystal sensors [J]. Progress in Chemistry, 2002,14(1):68-76.(in Chinese)[22] 邹志青,赵建龙. 纳米技术与生物传感器 [J]. 传感器世界,2004,10(12):5-11. ZOU ZH Q, ZHAO J L. Nanotechnology and Biosensors[J]. Sensor World, 2004,10(12):5-11.(in Chinese)
Sensitivity laws and prediction of piezoelectric force sensors at different loading points
Optimization of supporting beams of piezoelectric omnidirectional accelerometer under stress constraint
Sensing Characteristics of Long Period Fiber Grating Functionalized with Graphite Oxide
Sensing characteristics of long period fiber grating functionalized with graphite oxide
Flexible curvature sensor based on composite substrate
Related Author
ZHANG Jun
ZHEN Tiantian
CAI Jiale
LI Mengtong
LIU Yuting
Yan WANG
Yang XIA
Peng-bo LIU
Related Institution
State Key Laboratory of High-performance Precision Manufacturing,Dalian University of Technology
School of Automotive Engineering, Dalian University of Technology
Chongqing Municipal Engineering Research Center of Institutions of Higher Education for Intelligent Optical Fiber Sensing Technology, Chongqing University of Technology
Chongqing Key Laboratory of Optical Fiber Sensor and Photoelectric Detection, Chongqing University of Technology
Chongqing Key Laboratory of Optical Fiber Sensor and Photoelectric Detection, Chongqing University of Technology