Test of rotationally symmetric aspheric surface using Shack-Hartmann wavefront sensor

ZHANG Jin-ping; ZHANG Xue-jun; ZHANG Zhong-yu; ZHENG Li-gong

doi:10.3788/OPE.20122003.0492

您当前的位置：

首页 >

文章列表页 >

Test of rotationally symmetric aspheric surface using Shack-Hartmann wavefront sensor

Article | 更新时间：2020-08-12

- Test of rotationally symmetric aspheric surface using Shack-Hartmann wavefront sensor
- Optics and Precision Engineering Vol. 20, Issue 3, Pages: 492-498(2012)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所中国科学院光学系统先进制造技术重点实验室, 吉林长春 130033
  2. 中国科学院研究生院,北京 100039
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20122003.0492
  CLC： O439;TQ171.6+5
- Received：25 September 2010，
  
  Revised：24 March 2011，
  
  Published Online：22 March 2012，
  
  Published：22 March 2012
- 稿件说明：
移动端阅览
张金平, 张学军, 张忠玉, 郑立功. Shack-Hartmann波前传感器检测大口径圆对称非球面反射镜[J]. 光学精密工程, 2012,(3): 492-498

ZHANG Jin-ping, ZHANG Xue-jun, ZHANG Zhong-yu, ZHENG Li-gong. Test of rotationally symmetric aspheric surface using Shack-Hartmann wavefront sensor[J]. Editorial Office of Optics and Precision Engineering, 2012,(3): 492-498
张金平, 张学军, 张忠玉, 郑立功. Shack-Hartmann波前传感器检测大口径圆对称非球面反射镜[J]. 光学精密工程, 2012,(3): 492-498 DOI： 10.3788/OPE.20122003.0492.

ZHANG Jin-ping, ZHANG Xue-jun, ZHANG Zhong-yu, ZHENG Li-gong. Test of rotationally symmetric aspheric surface using Shack-Hartmann wavefront sensor[J]. Editorial Office of Optics and Precision Engineering, 2012,(3): 492-498 DOI： 10.3788/OPE.20122003.0492.

摘要

针对大口径非球面反射镜在研磨阶段后期其面形与理想面形存在较大偏差

且表面粗糙度较大、反射率较低

采用轮廓仪和普通干涉仪检测无法满足测试要求等问题

提出采用动态范围大且精度高的Shack-Hartmann波前传感器来检测大口径非球面反射镜。研究分析了Shack-Hartmann波前传感器检测系统的原理及系统误差并编写了相应的数据处理软件。为了验证该方法的可行性

对已经加工完成的350 mm口径旋转对称双曲面面形进行了检测

测量得到的面形误差PV值、RMS值分别为0.388、0.043(=632.8 nm);与干涉测量的标准结果进行了对比

得到的面形偏差PV值、RMS值分别为0.014和0.001。对比结果表明

Shack-Hartmann波前传感器的测量结果正确可靠

从而验证了Shack-Hartmann波前传感器检测大口径非球面反射镜的可行性。

Abstract

As the surface shape of a reflection mirror is different from the target shape at the end stage of the grinding process

and the profilometers and common interferometers can not measure the surface error exactly

this paper proposed a method to measure the large aperture aspheric surface by using a Shack-Hartmann Wavefront Sensor (SHWS) with a large dynamic range and high precision. The principle of the measuring system for SHWS was researched

its measuring errors were analyzed and a corresponding data processing software was compiled. Using a simulation reference file

a hyperboloid reflection mirror with a diameter of 350 mm was tested by the SHWS. Results indicate that the PV and RMS of the surface error are 0.388 and 0.043

respectively (=632.8 nm). In order to testify the measurement result

the mirror is also measured by an interferometer with a null compensator. Comparing the two testing results

the PV and RMS of the deviation are 0.014 and 0.001

respectively

which proves the feasibility of measuring large aperture aspheric surfaces by SHWSs.

关键词

Keywords

references

饶学军,凌宁,王成,等. 哈特曼-夏克传感器在非球面加工中的应用 [J].光学学报,2002(4):491-494. RAO X J,LING N,WANG CH, et al.. Application of Hartmann-Shack sensor in aspheric process[J].Acta Optica Sinica,2002(4):491-484.(in Chinese)[2] 程少园,曹召良,胡立发,等. 用夏克-哈特曼探测器测量人眼波前像差 [J].光学精密工程,2010,18(5):1060-1067. CHENG SH Y,CAO ZH L,HU L F, et al.. Measurement of wavefront aberrations of human eyes with Shack-Hartmann wavefront sensor[J].Opt. Precision Eng.,2010,18(5):1060-1067.(in Chinese)[3] YANG H S, LEE Y W, SONG J B, et al.. Null Hartmann test for the fabrication of large aspheric surfaces [J].Opt.Exp.,2005:1839-1847.[4] PFUND J, LINDLEIN N, SCHWIDER J, et al.. Absolute sphericity measurement: a comparative study of the use of interferometry and a Shack-Hartmann sensor[J].Opt.Lett.,1998,23:742-744.[5] NOVAK J, NOVAK P, MIKS A, et al.. Application of Shack-Hartmann wavefront sensor for testing optical systems[J].SPIE,2007,6609(15):1-11.[6] 刘春阳,朱秋东. 自准直哈特曼波前测量装置的研制 [J].光学技术,2008,38(1):98-104. LIU CH Y,ZHU Q D. The development of self referenced Hartmann wavefront sensor[J].Optical Technique,2008, 38(1):98-104.(in Chinese)[7] 夏明亮,李抄,刘肇南,等. Shack-Hartmann波前传感器图像自适应阈值的选择 [J].光学精密工程,2010,18(2): 334-340. XIA M L,LI CH,LIU ZH N, et al.. Adaptive threshold selection method for Shack-Hartmann wavefront sensors[J].Opt. Precision Eng., 2010,18(2):334-340.(in Chinese)[8] MALACARA D. Optical Shop Testing[M].New York:Wiley,2007.[9] SOUTHWELL W H. Wavefront estimation from wave-front slope measurements[J].J.Opt.Soc.Am.,1980,70:998-1006.[10] 曹正林,廖文和,沈建新,等. Zernike多项式拟合人眼波前像差的一种新算法 [J].光学精密工程,2006,14(2):308-314. CHAO ZH L,LIAO W H,SHEN J X. A new algorithm for human eye’s wave-front aberration fitting with Zernike polynomial [J].Opt. Precision Eng.,2006,14(2):308-314.(in Chinese)[11] 李华强,宋贺伦,饶长辉,等. 增大夏克-哈特曼波前传感器动态测量范围的方法 [J].光学精密工程,2008,16(7):1203-1207 LI H Q,SONG H L,RAO CH H, et al.. Extrapolation method to extend dynamic range of Shack-Hartmann wave-front sensor[J].Opt. Precision Eng.,2008, 16(7):1203-1207.(in Chinese)[12] PFUND J, LINDLEIN N, SCHWIDER J. Misalignment effects of the Shack-Hartmann sensor[J].J.Opt.Soc.Am., 1998,37(1):22-27.[13] NEAL D R, ARMSTRONG D J, TURNER W T. Wavefront sensors for control and process monitoring in optics manufacture[J].SPIE,1997,2993:211-220.[14] PFUND J, LINDLEIN N, SCHWIDER J. Nonnull testing of rotationally symmetric aspheres: a systematic error assessment[J].J.Opt.Soc.Am,2001,40(4):439-446.

Views

319

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Processing method of large off-axis aspheric mirror

Fabrication of zero-gravity surface for large-aperture aspherical mirror by using rotationally method

Performance of predictive correction for adaptive optics systems with frozen flow turbulence

Compound support structure for large aperture mirror of space remote sensor

Analysis and experiment of gravity deformation for large aperture rectangular mirror set

Related Author

Yi SUN

Jun WANG

Jun-liu FAN

Yun-hai TANG

Quan-ying WU

Bao-hua CHEN

Ji-you ZHANG

Yu-ming ZHOU

Related Institution

Graduate Practice Station in Soochow Mason Optics Co.， Ltd.

School of Physical Science and Technology， Suzhou University of Science and Technology

Beijing Institute of Space Mechanics & Electricity, Optical Ultraprecise Processing Technology Innovation Center for Science and Technology Industry of National Defense

Institute of Optics and Electronics, Chinese Academy of Sciences

University of Chinese Academy of Sciences

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰