Analysis and test of light spot transversal transfer of spectromicroscopic beamline

MA Lei; LU Qi-peng; PENG Zhong-qi

doi:10.3788/OPE.20122003.0514

您当前的位置：

首页 >

文章列表页 >

Analysis and test of light spot transversal transfer of spectromicroscopic beamline

Article | 更新时间：2020-08-12

- Analysis and test of light spot transversal transfer of spectromicroscopic beamline
- Optics and Precision Engineering Vol. 20, Issue 3, Pages: 514-519(2012)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春 130033
  2. 中国科学院研究生院,北京 100039
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20122003.0514
  CLC： TB92;TH744.1
- Received：08 March 2011，
  
  Revised：15 April 2011，
  
  Published Online：22 March 2012，
  
  Published：22 March 2012
- 稿件说明：
移动端阅览
马磊, 卢启鹏, 彭忠琦. 谱学显微光束线光斑水平漂移分析与检测[J]. 光学精密工程, 2012,(3): 514-519

MA Lei, LU Qi-peng, PENG Zhong-qi. Analysis and test of light spot transversal transfer of spectromicroscopic beamline[J]. Editorial Office of Optics and Precision Engineering, 2012,(3): 514-519
马磊, 卢启鹏, 彭忠琦. 谱学显微光束线光斑水平漂移分析与检测[J]. 光学精密工程, 2012,(3): 514-519 DOI： 10.3788/OPE.20122003.0514.

MA Lei, LU Qi-peng, PENG Zhong-qi. Analysis and test of light spot transversal transfer of spectromicroscopic beamline[J]. Editorial Office of Optics and Precision Engineering, 2012,(3): 514-519 DOI： 10.3788/OPE.20122003.0514.

摘要

为提高上海光源搭建的国内首条软X射线谱学显微光束线站的整体性能

分析了其分光装置-变包含角平面光栅单色仪在波长扫描过程中影响谱学显微光束线光斑水平漂移的各个因素

推导出了各因素与光斑水平漂移的传递关系

并结合具体要求进行了误差分配。针对光斑水平角漂移重复精度的检测

采用自准直原理

构建了测试系统。利用该系统

完成了谱学显微光束线站光斑水平漂移重复精度的离线检测

其结果为0.67

满足设计指标1的要求。对安装调试后的束线进行了总体性能测试

结果均满足谱学显微设计和使用要求。由此表明

提出的对谱学显微光束线光斑水平漂移误差来源的分析及检测方法

有效保证了束线性能的实现。

Abstract

With the aim to improve the unified performance of the first soft X-ray spectromicroscopic beamline built in Shanghai Synchrotron Radiation Facility(SSRF)

This paper analyzes the main factors that effect the light spot transversal transfer of the spectromicroscopic beamline during wavelength scanning by a variable-included-angle plane grating monochromator. It deduces the relation between various factors and light spot transversal transfer

and solves the error distribution of the system to ensure the performance of the beamline. A test system for the repeatability of light spot transversal transfer is built by auto collimation principle and the off-line testing of the light spot transversal transfer is finished by using this test system. The result shows that the repeatability is 0.67

which satisfies the technical requirement of 1. The unified performance for the beamline is tested after it is assembled. Obtained results meet the requirements of design and application

and prove the effectiveness of error analysis and testing for the light spot transversal transfer.

关键词

Keywords

references

CHEN S Y, XU H J. Current status of the proposed shanghai synchrotron radiation facility [J]. KEK. , 1998,98(10):631-635.[2] PETERSEN H. The plane grating and elliptical mirror: A new optical configuration for monochromators[J]. Opt.Comm, 1982, 40(6):402-406.[3] YOUNG A T, FENG J, ARENHOLZ E, et al.. First commissioning results for the elliptically polarizing undulator beamline at the advanced light source [J]. Nucl. Instr.Met, 2001, 467:549-552.[4] NYHOLM R, ANDERSEN J N, JOHANSSON U, et al.. Beamline I311 at MAX LAB: a VUV/soft X ray undulator beamline for high resolution electron spectroscopy [J]. Nucl. Instr.Meth, 2001, 467:520-524.[5] MATSUSHITA T, MAEZAWA H, ISHIKAWA T, et al.. New multipole wigglet /undulator beamline (BL-16) at the photon factory[J]. Sci.Instr, 1989, 60(7):1874-1876.[6] KAZNACHEYEV K V, BLOMQVIST I, HALLIN E, et al.. Principles of optical design of the SM beamline at the CLS. AIP Conference Proceedings, 2004, 705:1303-1307.[7] 卢启鹏, 李勇军, 彭忠琦,等. 六杆并联机构运动学正解研究及在同步辐射光束线中的应用 [J]. 光学精密工程, 2008,16(10): 1874-1879. LU Q P, LI Y J, PENG ZH Q, et al.. Forward kinematics of six-bar parallel mechanism and its applications in synchrotron radiation beamline[J]. Opt. Precision Eng., 2008, 16(10): 1874-1879. (in Chinese)[8] 吴坤, 薛松, 卢启鹏, 等. SX700单色器光栅正弦机构转角重复精度的模拟分析与测量 [J]. 光学精密工程, 2010, 18(1):45-51. WU K, XUE S, LU Q P, et al.. Simulation analysis and measurement of ration angle repeatability for grating sine mechanism of SX700 monochromator[J]. Opt. Precision Eng., 2010, 18(1):45-51. (in Chinese)[9] 吕丽军. 极紫外、软X-射线变线距平面光栅单色仪的研究 [J].光学学报,2005,25(1):141-144. LU L J.Study of ultraviolet and soft X-ray varied line-space planegrating monochromator [J].Acta Optica Sinica, 2005,25(1):141-144. (in Chinese)[10] 卢启鹏,马磊,彭忠琦,等. 变包含角平面光栅单色器波长扫描机构转角精度的检测方法研究 [J]. 光学精密工程, 2010, 18(7):1548-1553. LU Q P, MA L, PENG ZH Q. Rotation-angle-accuracy measurement of VAPGM wavelength scanning mechanism[J]. Opt. Precision Eng., 2010,18(7):1548- 1553. (in Chinese)[11] 费业泰. 误差理论与数据处理 [M]. 4版.北京:机械工业出版社, 2000: 58-80. FEI Y T. Error Hheory and Data Processing[M]. 4 th ed.Beijing:China Machine Press, 2000:58-80. (in Chinese)[12] The instruction manual of ELCOMAT 3000 autocollimator. www.opticaltest.com

Views

245

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Deflectometric measurement technology for optical surfaces： principles， challenges， and prospects（invited）

EIS for ground-based imaging systems supporting scene switching perception

High-precision measurement of Wolter-I mandrel for X-ray microscopy by using double confocal probes

Axis alignment and error analysis of a novel rotating laser-scanning system

Magnetic field time-gate displacement sensor based on discrete winding and its error characteristics

Related Author

ZHANG Xiangchao

NIU Xingman

HAO Siyuan

LANG Wei

LI Pingfeng

LIU Ruiyang

ZHANG Zonghua

SONG Liduo

Related Institution

School of Information Science and Technology， Fudan University

College of Mechanical Engineering， Hebei University of Technology

Changchun Institute of Optics，Fine Mechanics and Physics，Chinese Academy of Sciences

Academy for Advanced Interdisciplinary Studies， Northeast Normal University

Institute of Precision Optical Engineering， School of Physics Science and Engineering， Tongji University

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰