Design of CNC non-contact super-smooth polishing machine for optical components

LI Xian-ling

doi:10.3788/OPE.20122004.0719

您当前的位置：

首页 >

文章列表页 >

Design of CNC non-contact super-smooth polishing machine for optical components

Article | 更新时间：2020-08-12

- Design of CNC non-contact super-smooth polishing machine for optical components
- Optics and Precision Engineering Vol. 20, Issue 4, Pages: 719-726(2012)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春,130033
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20122004.0719
  CLC： TQ171.684;TH161
- Received：10 June 2011，
  
  Revised：19 July 2011，
  
  Published Online：22 April 2012，
  
  Published：22 April 2012
- 稿件说明：
移动端阅览
李显凌. 数控非接触式超光滑光学元件加工机床的设计[J]. 光学精密工程, 2012,(4): 719-726

LI Xian-ling. Design of CNC non-contact super-smooth polishing machine for optical components[J]. Editorial Office of Optics and Precision Engineering, 2012,(4): 719-726
李显凌. 数控非接触式超光滑光学元件加工机床的设计[J]. 光学精密工程, 2012,(4): 719-726 DOI： 10.3788/OPE.20122004.0719.

LI Xian-ling. Design of CNC non-contact super-smooth polishing machine for optical components[J]. Editorial Office of Optics and Precision Engineering, 2012,(4): 719-726 DOI： 10.3788/OPE.20122004.0719.

摘要

基于数控技术

提出了一种非接触式光学元件表面超光滑液体抛光方法。通过磨头中心孔为抛光表面提供抛光液

抛光液在磨头自转的带动下与光学元件表面相互作用

实现光学元件表面材料的微量去除

利用计算机控制抛光磨头的运动轨迹完成对光学元件表面的抛光。根据上述原理

设计和研制了数控非接触表面超光滑光学元件加工机床样机

样机直线运动轴最低进给速度为0.000 1 m/s

定位精度为0.008 mm;摆动轴最低转速为0.002 8 r/min

定位精度为15。抛光实验结果表明

经过20 min的超光滑加工

熔石英材质光学元件上两点的表面粗糙度

值分别由加工前的1.03 nm和0.92 nm提高到加工后的0.48 nm和0.44 nm

显著提高了加工精度。

Abstract

A Computer Numerical Control (CNC) non-contact super-smooth polishing method for optical components was proposed. Polishing fluid was provided through a center hole of the polishing tool for the optical surface and it interacted with the surfaces of optical components drived by a rotated polishing tool to remove the materials on the optical components minutely. The motion trajectory of the polishing tool could be controlled by the computer. According to the proposed principle

a prototype of CNC non-contact super-smooth polishing machine for the optical components was designed and developed

and its minimum feed rate and positioning accuracy for the linear motion axis are 0.000 1 m/s and 0.008 mm

respectively; the minimum rotate speed and positioning accuracy for the swing shaft are 0.002 8 r/min and 15'

respectively. The performance of the prototype could meet the requirements of spherical/aspherical optical components with diameters less than 200 mm for super-smooth polishing. To verify the prototype

an experiment was performed on a fused silica component. After super-smooth polishing for 20 min

the surface roughness of two points on the optical component is improved from 1.03 nm and 0.92 nm to 0.48 nm and 0.44 nm

which shows the polishing accuracy has been optimized greatly.

关键词

Keywords

references

DIETZ R W, BENNETT J M. Bowl feed technique for producing supersmooth optical surfaces [J]. Appl. Opt., 1966,5(5):881-882.[2] LEISTNER A J, THWAITE E G, LESHA F, et al.. Polishing study using Teflon and pitch laps to produce flat and supersmooth surfaces [J]. Appl. Opt.,1992,31(10):1472-1482.[3] 苏建修.IC制造中硅片化学机械抛光材料去除机理研究. 大连:大连理工大学,2006. SU J X. Study on material removal mechanism of wafer chemical mechanical polishing in IC manufacturing . Dalian: Dalian University of Technology, 2006. (in Chinese)[4] CARL ZEISS SMT AG. Ion beam figuring for lithography optics [J]. Nucl. Instr. Meth. Phys. Res. B, 2009,267(8-9):1390-1393.[5] 武建芬,卢振武,张红鑫,等. 光学非球面离子束加工模型及误差控制[J]. 光学精密工程,2009,17(11):2678-2683. WU J F, LU ZH W, ZHANG H X, et al.. Model of ion beam figuring in aspheric optics and its error control [J]. Opt. Precision Eng., 2009,17(11):2678-2683. (in Chinese)[6] KIRKPATRICK A. Gas cluster ion beam applications and equipment [J]. Nucl. Instr. Meth. Phys. Res. B, 2003, 206:830-837.[7] BOLLINGER L D, STEINBERG G, ZAROWIN C B. Rapid optical figuring of aspherical surfaces with plasma-assisted chemical etching [J]. SPIE,1992,1618:14-21.[8] 张巨帆,王波,董申. 大气等离子体抛光技术在超光滑硅表面加工中的应用[J]. 光学精密工程,2007,15(11):1749-1755. ZHANG J F, WANG B, DONG SH. Application of atmospheric pressure plasma polishing method in machining of silicon ultra-smooth surface [J]. Opt. Precision Eng., 2007,15(11):1749-1755. (in Chinese)[9] 施春燕,袁家虎,伍凡,等. 冲击角度对射流抛光中材料去除面形的影响分析[J]. 光学学报,2010,30(2):513-517. SHI CH Y, YUAN J H, WU F, et al.. Influence analysis of impact angle on material removal profile in fluid jet polishing [J]. Acta Optica Sinica, 2010,30(2):513-517. (in Chinese)[10] 高宏刚,曹健林,陈斌,等. 浮法抛光原理装置及初步实验[J]. 光学精密工程,1995,3(1):57-60. GAO H G, CAO J L,CHEN B, et al.. A prototype apparatus for float polishing and initial experiments [J]. Opt. Precision Eng., 1995,3(1):57-60. (in Chinese)[11] GORMLEY J V, MANFRA M J, CALAWA A R. Hydroplane polishing of semiconductor crystals [J]. Rev. Sci. Instrum., 1981,52(8):1256-1259.[12] KANAOKA M, LIU C, NOMURA K, et al.. Processing efficiency of elastic emission machining for low-thermal-expansion material [J]. Surf. Interface. Anal., 2008,40:1002-1006.[13] 石峰,戴一帆,彭小强,等. 磁流变抛光消除磨削亚表面损伤层新工艺[J]. 光学精密工程,2010,18(1):162-168. SHI F, DAI Y F, PENG X Q, et al.. Removal of subsurface damage in grinding magnetorheological finishing [J]. Opt. Precision Eng., 2010,18(1):162-168. (in Chinese)[14] JUNG B, JANG K I, MIN B K, et al.. Magnetorheological finishing process for hard materials using sintered iron-CNT compound abrasives [J]. Int. J. Mach. Tool. Manu., 2009,49:407-418.

Views

572

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Fabrication and testing of large aspheric system based on common reference

Coordinate-origin calibration of removal function in Magnetorheological Finishing

Magnetorheological finishing for curve surface based on 4-axis machine

Fast grinding of large SiC off-axis aspheric surface

Fabrication and properties of ultra-lightweight SiC mirror

Related Author

Xiao-kun WANG

Dong-lin XUE

Xue-jun ZHANG

Long-xiang LI

Xiao-kun WANG

Dong-lin XUE

Xue-jun ZHANG

Li-gong ZHENG

Related Institution

Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

Key Laboratory of Optical System Advanced Manufacturing Technology, Chinese Academy of Sciences, Chuangchun

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

University of Chinese Academy of Sciences, Beijing 100049, China

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰