System-level modeling for MEMS optical components

LI Xiao-ying; LI Hui-min; CHANG Hong-long; HE Yang; JIAO Wen-long

doi:10.3788/OPE.20122005.1069

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System-level modeling for MEMS optical components

Article | 更新时间：2020-08-12

- System-level modeling for MEMS optical components
- Optics and Precision Engineering Vol. 20, Issue 5, Pages: 1069-1075(2012)
- 作者机构：
  
  西北工业大学陕西省微/纳米系统重点实验室,陕西西安,710072
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20122005.1069
  CLC： TH703;TP391
- Received：27 December 2011，
  
  Revised：16 February 2012，
  
  Published Online：10 May 2012，
  
  Published：10 May 2012
- 稿件说明：
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李晓莹, 李慧敏, 常洪龙, 何洋, 焦文龙. 微机电系统光学组件的系统级建模[J]. 光学精密工程, 2012,20(5): 1069-1075

LI Xiao-ying, LI Hui-min, CHANG Hong-long, HE Yang, JIAO Wen-long. System-level modeling for MEMS optical components[J]. Editorial Office of Optics and Precision Engineering, 2012,20(5): 1069-1075
李晓莹, 李慧敏, 常洪龙, 何洋, 焦文龙. 微机电系统光学组件的系统级建模[J]. 光学精密工程, 2012,20(5): 1069-1075 DOI： 10.3788/OPE.20122005.1069.

LI Xiao-ying, LI Hui-min, CHANG Hong-long, HE Yang, JIAO Wen-long. System-level modeling for MEMS optical components[J]. Editorial Office of Optics and Precision Engineering, 2012,20(5): 1069-1075 DOI： 10.3788/OPE.20122005.1069.

摘要

为提高微机电系统(MEMS)中光学系统整体仿真的准确性和效率

解决光学组件系统级建模存在的问题

提出了一种光学组件系统级建模方法

该方法可同时支持与MEMS系统级机械组件和电路组件共同仿真。首先

介绍了多端口组件网络方法、高斯光束特点和空间坐标系变换理论。接着

以微平面镜为例

介绍了光学组件系统级建模方法的流程。最后

采用Verilog-A硬件描述语言建立了包含多个典型光学组件的系统级光学库。使用该库的光学组件在MEMS集成设计工具MEMS Garden中搭建微扫描系统进行了仿真与测试。与商业软件CoventorWare的分析结果相比

提出的建模方法解决了扫描盲区问题

且非差分电压分析的误差小于3%。结果显示

本文提出的建模方法精确有效

对MEMS的系统级设计有参考价值。

Abstract

To improve the accuracy and efficiency of the simulation for the optical system in a Micro-electro-mechanical System (MEMS) and to overcome the difficulties in the system-level modeling of MEMS optical components

a system-level modeling method was proposed to support the co-simulation for MEMS system-level mechanical components and electrical components. First

the modeling methodology of Multi-Port-Element Network (MuPEN)

the characteristics of Gaussian beam and the theory of space coordinate transformation were introduced. Then

the modeling process of a micro-mirror was given to explain the modeling method of all optical components. Finally

using the hardware description language of Verilog-A

an optical library including some typical components was established. The non-differential voltage simulation results of the system-level scanning system were compared with those of CoventorWare and results show that the scanning system in former environment can eliminate the blind area

and the maximum error is within 3%. It indicates that the proposed modeling method for optical components could work effectively and accurately

and the study is significant value to the MEMS system-level design.

关键词

Keywords

references

FEDDER G K. A vision of structured CAD for MEMS . Proceedings of the Fifth ACM/SIGDA Physical Design Workshop, Reston, 1996:76-80.[2] MUKHERJEE T, FEDDER G K. Structured design of microelectro-mechanical systems . Proceedings of the 34th Annual Design Automation Conference(DAC'97),New York,USA, 1997.[3] 苑伟政,常洪龙.泛结构化微机电系统集成设计方法[M]. 西安:西北工业大学出版社 ,2010. YUAN W ZH,CHANG H L. The Structured Microelectromechanical System Integration Design Method[M].Xi’an: Northwestem Polytechnical University Press,2010. (in Chinese)[4] Coventorware, SanMateo, CA. . Available: http://www.coventor.com[5] KUZWEG T P, MARTINEZ J A. New models for optical MEMS[J]. Photonics East, Boston, MA, 2001:1-12.[6] 霍鹏飞. 微机电系统的多端口组件网络方法系统级建模研究 . 西安:西北工业大学 ,2004. HUO P F.A methodology of multi-port-element network for MEMS system-level modeling .Xi’an: Northwestem Polytechnical University, 2004. (in Chinese)[7] 叶玉堂,饶建珍,肖峻.光学教程[M]. 北京:清华大学出版社 ,2005. YE Y T, RAO J ZH, XIAO J. Optical Tutorial[M].Beijing: Tsinghua University Press,2005. (in Chinese)[8] KUNDET K, ZINKE O. The Designer's Guide to Verilog-AMS[M]. Kluwer Academic Publishers, 2004.[9] QI J. Modeling and simulation for design of suspended MEMS . Carnegie Mellon University. 2003.[10] 苑伟政,牛昊彬,常洪龙,等. MEMS器件与电路共同仿真原型系统 [J].光学精密工程,2010,18(10):2206-2211. YUAN W ZH,NIU H B,CHANG H L, et al.. Co-simulation of MEMS and circuits in Zeni-VLG[J]. Opt. Precision Eng., 2010,18(10):2206-2211. (in Chinese)[11] TOSHIYOSHI H, TANAMETHA W P,CHENG-T C. Linearization of electrostatically actuated surface micromachined 2-D optical scanner [J]. Journal of Microelectromechanical Systems, 2001,10(2):205-214.

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