Feed-forward control of piezoelectric ceramic positioning stage

WANG Li; RAO Chang-hui; RAO Xue-jun

doi:10.3788/OPE.20122006.1265

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Feed-forward control of piezoelectric ceramic positioning stage

更新时间：2020-08-12

- Feed-forward control of piezoelectric ceramic positioning stage
- Optics and Precision Engineering Vol. 20, Issue 6, Pages: 1265-1271(2012)
- 作者机构：
  
  1. 中国科学院光电技术研究所,四川成都,610209
  2. 中国科学院研究生院北京,100039
  3. 中国科学院自适应光学重点实验室,四川成都,610209
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20122006.1265
  CLC： TN384;TP273
- Received：10 February 2012，
  
  Revised：05 March 2012，
  
  Published Online：10 June 2012，
  
  Published：10 June 2012
- 稿件说明：
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王俐, 饶长辉, 饶学军. 压电陶瓷微动台的复合控制[J]. 光学精密工程, 2012,20(6): 1265-1271

WANG Li, RAO Chang-hui, RAO Xue-jun. Feed-forward control of piezoelectric ceramic positioning stage[J]. Editorial Office of Optics and Precision Engineering, 2012,20(6): 1265-1271
王俐, 饶长辉, 饶学军. 压电陶瓷微动台的复合控制[J]. 光学精密工程, 2012,20(6): 1265-1271 DOI： 10.3788/OPE.20122006.1265.

WANG Li, RAO Chang-hui, RAO Xue-jun. Feed-forward control of piezoelectric ceramic positioning stage[J]. Editorial Office of Optics and Precision Engineering, 2012,20(6): 1265-1271 DOI： 10.3788/OPE.20122006.1265.

摘要

压电陶瓷微动台的迟滞非线性严重影响其动态定位精度

为了解决这一问题

采用一种改进的PI模型对微动台的迟滞非线性进行了建模。为了提高传统PID算法对压电陶瓷微动台的动态定位性能

将改进的PI模型与传统PID算法组合构成前馈复合控制算法

并进行了微动台的慢速与快速动态定位实验。结果表明

对同频曲线定位时

前馈PID复合算法的最大误差为传统PID算法的40%左右

平均误差为传统算法的20%~30%左右;对多频曲线定位时

前馈PID复合算法的最大误差和平均误差为传统PID算法的33%左右。数据表明前馈PID复合算法的动态定位性能明显优于传统PID算法。

Abstract

As the nonlinear hysteresis of a piezoelectric ceramic positioning stage affects its dynamic positioning precision badly

this paper proposes a model for the piezoelectric ceramic hysteresis based on a modified PI hysteresis model. In order to improve the dynamic positioning precision of the piezoelectric ceramic positioning stage based on traditional PID algorithm

the feed-forward control is constituted with the modified PI inverse hysteresis model and a traditional PID

and the experiments on slow speed and high speed positionings are performed. Experimental results show that the maximal error and mean error of the feed-forward controller are 40% and 20%-30% that of traditional PID algorithm for tracking single frequency trajectory.For multi-frequency trajectory tracking

the feed-forward controller has better dynamic control effect

and both maximal error and mean error are almost 33% that of traditional one.These data indicate the availability of the feed-forward control algorithm.

关键词

Keywords

references

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